EC-5000 Series

EC-5000

Exhaust Pressure Controller

The EC-5000 series exhaust pressure controller can maintain a consistent pressure, of the user’s choice, within the chamber. The high-resolution stepper motor and unique butterfly valve ensure a fast, sensitive response to any pressure changes.

Segment: Semiconductor
Division: Fluid Control
Manufacturing Company: HORIBA STEC, Co., Ltd.

Benefits:

  • Suitable for high vacuum: stainless steel body
  • Corrosion resistant: models with PTFE bodies are also available
  • RoHS compliant.

When the exhaust flow rate is adjusted to optimal levels:

  • The resist is distributed in an even film
  • Secondary deposition of the mist is prevented
  • The diffusion of dangerous vapor is prevented.

There is less change in sensitivity caused by the accumulation of resist and other contamination compared with flow rate sensor control and the influence of turbulence and other noise is eliminated which enables superior, stable, responsive control.

 

Model                   EC-

5104

5105

5202

Compatible size

NW40

NW50

25 mm PTFE fitting

1 inch PTFE fitting

Materials at gas contact area

SUS316L, Fluoro rubber

PTFE, PEEK, Fluoro rubber

Conductance
(in vacuum area)

0.4 to 80L/s

0.6 to 200L/s

——

Outflow at 100 mm H2O
(fully closed)

20L/min

25L/min

3L/min

* This product is subject to Japan's Export Control Law (i.e. on its control list). Before it is exported from Japan to overseas or supplied to non-residents, an Export License must be obtained from the Ministry of Economy, Trade and Industry (METI) of Japan.

External Dimension

 

Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Process Control and In-situ Measurement for Photovoltaic Manufacturing Process

Request for Information

Do you have any questions or requests? Use this form to contact our specialists.

* These fields are mandatory.

Related products

EV 2.0 Series
EV 2.0 Series

Endpoint / Chamber Health Monitor based on Optical Emission Spectroscopy and MWL Interferometry

EV-140C
EV-140C

Optical Emission Spectroscopy Etching End-point Monitor

LF-F/LV-F Series
LF-F/LV-F Series

Digital Liquid Mass Flow Meters / Controllers

LSC series
LSC series

Compact Baking System

LU Series
LU Series

Liquid Auto Refill System

MI-1000/MV-1000
MI-1000/MV-1000

Mixed Injection System Liquid Vaporizers

MV-2000
MV-2000

Mixed Injection System Liquid Vaporizer

PV Series
PV Series

Piezo Actuator Valve

SEC-8000 F/D/E Series
SEC-8000 F/D/E Series

High Temperature Digital Mass Flow Controller

SEC-N100 Series
SEC-N100 Series

Digital Mass Flow Controller

SEC-Z500X Series
SEC-Z500X Series

Multi Range/Multi Gas Digital Mass Flow Controller

UR-Z700 Series
UR-Z700 Series

Digital Automatic Pressure Regulator

VC Series
VC Series

Direct Liquid Injection System

GR-300 Series
GR-300 Series

Wafer Back Side Cooling System

PTFM-1000V2
PTFM-1000V2

Pitot Tube Exhaust Flow Meter

PV Series
PV Series

Piezo Actuator Valve

UR-Z700 Series
UR-Z700 Series

Digital Automatic Pressure Regulator

VG-200S
VG-200S

Capacitance Manometer