EV-140C

Optical Emission Spectroscopy Etching End-point Monitor EV-140C

Optical Emission Spectroscopy Etching End-point Monitor

This emission analysis type end-point monitor is intended for end-point detection or plasma condition control in the plasma-based semiconductor thin-film process. The newly-developed Rapture Intensity algorithm allows accurate end-point detection by capturing faint signal changes. The ability of capturing subtle changes in emission has significantly improved the sensitivity. The enhanced noise immunity ensures highly stable operation in hostile environments of round-the-clock manufacturing lines.

 

Segment: Semiconductor
Division: Dry Process Control
Manufacturing Company: HORIBA, Ltd.
  • Bright grating with opening ratio of F/2

A bright optical system is achieved by the use of a large, aberration-correcting concave grating of 70 mm in diameter manufactured by HORIBA Jobin Yvon. The light-gathering ability of the concave grating itself enables the construction of a simple optical system that is brighter than Czerny-Turner spectroscopes and that can minimize the reflection loss caused by mirrors and other reflective surfaces.

  • Back-illuminated CCD line sensor offering high sensitivity and high resolution of 2,048 channels

A back-illuminated CCD achieves high quantum efficiency, ensuring stable spectroscopy in the broad spectrum from UV to visible regions. The highly sensitive measurement possible in the UV region, in particular, enables end-point detection in the wavelength range which is less affected by interference.

  • Sigma-P software for advanced process control

This software executes a variety of steps required for process control, from the analysis of plasma behavior to the creation of databases of measured data and remote control of manufacturing equipment.
The programmable structure of the measurement recipe enables setting of multiple detection conditions and sequential processing. This allows the monitor to be used not only for end-point applications but also for comprehensive plasma condition monitoring.

  • Recipe setting example

This is an advanced setting which warns of abnormal plasma condition as well as conducting end-point measurement using the ratio between two wavelengths.

  • Full reprocessing function

Once spectroscopy data is obtained, simulation for recipe optimization or end-point detection can be repeated as desired by applying new recipe conditions.
A library used to identify the emission species in plasma is included as standard.
Spectroscopy data can be converted into a time course graph, or can be displayed freely on the screen using screen layout, operation waveforms, and comparative calculation waveforms against reference data, and other information.

  • Auto Pattern software for the analysis of time course patterns

It is a daunting challenge to find minute pattern changes from an enormous amount of spectrum data with noise. Auto Pattern automatically finds characteristic pattern changes to determine the optimum end-point wavelength.

  • Strong end-point algorithms

End-points can be accurately detected by using the user-specified wavelength-to-wavelength calculation waveform and filtering. The newly-developed Rapture Intensity algorithm allows constant monitoring of the changes in the intersecting angle between the two straight lines which approximate the two specified sections. This ensures that points of change are differentiated appropriately from noise without delay, and that extremely small signal changes such as end-points with small opening areas, are accurately detected.

  • Example of weak signal waveform reprocessing

Etching monitoring over a small opening area (<0.2%).
After a frequency filter processes noise from the original signal, the differential signal (pink line) of the ratio (black line) of (rise (A+B+C)/decrease (D+E+F) curve) leads to accurate detection of the end-point.

  • Recipe Designer, a recipe generation tool automatically synchronised with analysis results (optional software)

Recipe Designer is an extended version of the Auto Pattern analysis tool. It allows the user to generate an optimum Rapture Intensity algorithm simply by following on-screen instructions for analysis and simulation. The algorithm can easily be built into the real recipe. This can greatly lighten the load of recipe generation for end-points of weak and complicated emission species or end-points which cannot be detected due to changes in process conditions, or similar cases.

  • Example of Recipe Designer setting

STEP1: Automatic extraction of the pattern of wavelength changes
STEP2: Identification of the point of change using the approximation of two straight lines
STEP3: The EDP simulation conducted by Rapture Intensity and the completed algorithm can be exported and built into Sigma-P.

  • Advanced statistical processing: Feedback to recipes

The statistical process editor is able to analyze the log data from many different perspectives, helping to improve abnormality analysis and yield rates. The results of the analysis can be fed back to measurements.

 

Sensor unit

Optical unit
Wavelength range200 - 800 nm
Optical resolution<2.0 nm @ =200 - 500 nm
<2.5 nm @ =500 - 700 nm
(FWHM theoretical resolution)
Optical design
DesignAberration corrected Flat field concave grating
Focal length140 mm
2nd order filterBuilt-In
Detector
CCD typeBack thinned linear CCD image sensor
Pixel number2048 × 64
A/D resolution16 bit
Integration time20 ms - 2.5 s (10 msec step)
Specification
Optical inputOptical fiber
Sensor unit dimensions137 (W) × 156 (H) × 257 (D) mm
5.4 (W) × 6.1 (H) × 10.1 (D) in
Sensor unit mass4.0 kg
Connecting chamber number1 Ch
Power supply24 V DC ± 10 %
Power consumption12 VA (Max)
Operating temperature requirements15 - 35 °C
Ambient temperature0-50 °C (no condensation)
Operating moisture requirements<80%RH at 25 °C (no condensation)
Front LCD displayRun status indicator (Sensor err /Controller err)
Cooling fanDC fan
IN/OUT
◎ for Output signal with measurement curve link
Output port number2 ch
Output range0 - 5 V DC
◎ for PIO remote protocol
Digital outputPIO / (DI = 8 bit/ DO = 8 bit)
PIO remote protocol connectorDsub25S
(PIO port, Analog output port)
Controller interfaceEthernet × 1 port

Controller unit

Unit dimension197 (W) × 148 (H) × 250 (D) mm
7.8 (W) × 5.8 (H) × 9.8 (D) in
OSWindowsXP embeded (English version)
CPUCeleron 1.3 GHz
Main memory

1 GB

HDD80 GB
InterfaceEthernet × 2, RS232C × 2
Power supply90 - 264 V AC, 50/60 ± 3 Hz

Remote protocol capability

CommunicationPIO/RS232C serial
*Designing capability for LAN communication

Certification

StandardsCE/FCC

Accessory

Optical fiber
SpecificationQuartz fiber
Fiber gradeVIS or UV
Fiber length2 m

Option

DC power supply unit
Power supply90-264 V AC 50/60 ±3 Hz
DC power supply spec24 V DC, 2 A output
Chamber adapter
AdapterCondenser lens unit
PC accessory
PC accessoryLCD monitor/Key board / mouse
PC battery option
UPSUPS option for controller PC
Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Process Control and In-situ Measurement for Photovoltaic Manufacturing Process

Request for Information

Do you have any questions or requests? Use this form to contact our specialists. * These fields are mandatory.

Related products

EC-5000 Series
More EC-5000 Series

Exhaust Pressure Controller

FDM Series
More FDM Series

POCl3 Auto Refill System

LF-F/LV-F Series
More LF-F/LV-F Series

Digital Liquid Mass Flow Meters / Controllers

LSC series
More LSC series

Compact Baking System

LU Series
More LU Series

Liquid Auto Refill System

MI-1000/MV-1000
More MI-1000/MV-1000

Mixed Injection System Liquid Vaporizers

MICROPOLE System
More MICROPOLE System

Compact Process Gas Monitor

MV-2000 Series
More MV-2000 Series

Mixed Injection System Liquid Vaporizer

PV Series
More PV Series

Piezo Actuator Valve

SEC-8000 F/D/E Series
More SEC-8000 F/D/E Series

High Temperature Digital Mass Flow Controller

SEC-N100 Series
More SEC-N100 Series

Digital Mass Flow Controller

SEC-Z500X
More SEC-Z500X

Multi Range/Multi Gas Digital Mass Flow Controller

UR-Z700 series
More UR-Z700 series

Digital Automatic Pressure Regulator

VC Series
More VC Series

Direct Liquid Injection System

GD-Profiler 2™
More GD-Profiler 2™

Discover a Whole New World of Information with Glow Discharge Optical Emission Spectrometer

H20-UVL
More H20-UVL

Vacuum Spectrometer: A Compact Monochromator for the 100-600 nm region

H30-UVL
More H30-UVL

Vacuum Spectrometer: Monograph for far and extreme ultraviolet

PGM1000
More PGM1000

Vacuum Spectrometer -Monograph to explore the 1- 125 nm

PGM200
More PGM200

Vacuum Spectrometer - Plane Grating Monographs

RU-1000
More RU-1000

Plasma Emission Controller

TGM1200
More TGM1200

Vacuum Spectrometer - Monochromator with 1000 mm focal length to cover the 12.5-400 nm spectral range.

TGM1900
More TGM1900

Vacuum Spectrometer - Monochromator with 1146 mm focal length to cover the 8-128 nm spectral range.

TGM300
More TGM300

Vacuum Spectrometer - Monochromator with 300 mm focal length to cover the 10-300 nm spectral range

TGS300
More TGS300

Vacuum Spectrometer - Toroidal Grating Spectrograph, coming from Synchrotron technologies

VHR Series
More VHR Series

Vacuum Spectrometer - Vacuum High Resolution monochromators for the 100-1500 nm region