Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
PV Series
Piezo Actuator Valve
The Piezo Actuator Valve PV Series consists of piezo actuator valves with metal diaphragms and metal O-rings. When combined with a pressure sensor or flow rate sensor and ratio control unit (PCU series) you can use the Piezo Actuator Valve PV Series to create a pressure control or flow rate control system.
Benefits:
- Ultraclean due to an all metal construction
- Wide flow range: from 1 CCM to 50 LM
- High temperature models are available (PV-1000S/2000S)
- Pressure control from an external unit
PV-1000
| Flow Range | 1/5/100/200/500 CCM 1/2/5 LM (Inlet:atmospheric pressure•Outlet:vacuum•N2equiv) |
|---|---|
| Flow Control Range | 2 -100% F.S. |
| Valve Type | normally open / close |
| Input Signal | 0 - 5VDC |
| Responce | less than 0.5 sec. |
| Operating Temperature | 0 - 50 °C |
| Operating Diffential Pressure | MAX. 300 kPa(a)(max,42psi) |
| Pressure Resistance | 1MPa |
| Leak Integrity | 5×10-12Pa•m3(He) |
PV-2000
| Flow Range | 10/20 LM |
|---|---|
| Flow Control Range | 2 -100% F.S. |
| Valve Type | normally open / close |
| Input Signal | 0 - 5VDC |
| Responce | less than 0.5 sec. |
| Operating Temperature | 0 - 50 °C |
| Operating Diffential Pressure | MAX. 300 kPa(a)(max,42psi) |
| Pressure Resistance | 1MPa |
| Leak Integrity | 5×10-12Pa•m3(He) |
External Dimension
