Wide range TMAH Concentration Monitor HE-960H-TM

HE-960H-TM,HE-960H-KOH,HE-960H-TM-S

Accurately measures the concentration of TMAH (Tetra Methyl Ammonium Hydroxide), which is the main component of the photoresist developer solutions in semiconductor manufacturing. Wide measurement range : 0 - 10 %. Have the chemical resistant carbon sensor.

 

Segment: Semiconductor
Division: Wet Process Control
Base product
Manufacturing Company: HORIBA Advanced Techno Co. Ltd.

 

  • Wide range measurement
        Concentration: 0 - 10%, Conductivity: 0 - 1000 mS/cm
  • Automatic display range switching
  • Enables three types of measurement: TMAH concentration, conductivity, and temperature
  • Chemical resistant carbon sensor
  • 24 V DC power supply
  • RoHS compliant

 

 

Indication Converter

ModelHE-960H-TM
Measurement range0 - 10%
Ambient environmentTemperature: -5 to 45°C, Relative humidity: 20 to 85 % (without condensation)
Power supply24 V DC ±10%, 10 W (max.)
Protective structurePanel: IP65, Rear case: IP20, Terminal: IP00 (indoor-use panel installation type)
MassApprox. 550 g
Conforming standardsCE marking, FCC Part 15
Compatible sensorsFES-510 series (flow-type carbon sensor)

Schematics

Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process
Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process
Readout47-Conductivity Meter with Carbon Electrodes and Application for Densitometers
CategoryDocuments
Size 1.8 MB
FiletypePDF

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