2-Channel Resistivity Meter HE-960RW-GC(W)

2-Channel Resistivity Meter HE-960RW-GC(W)

The HE-960RW-GC(W) is a 2-channel simultaneous-measurement carbon sensor, resistivity meter that can be connected with two sensors. The measurement range is: 0 - 100.0 MΩ・cm.
The high performance and high precision is maintained while simultaneously measuring the output of the resistivity of different two locations. This is carried out in a single converter for overall cost efficient performance.

 

Segment: Semiconductor
Division: Wet Process Control
Base product
Manufacturing Company: HORIBA Advanced Techno Co. Ltd.

 

  • 2-channel simultaneous measurement
  • High precision temperature compensation
  • 2-channel transmission outputs
  • Chemically resistant glass carbon sensor
  • DC 24 V power source
  • CE Marking compliant

 

 

ModelHE-960RW-GC(W)
Measurement range0.00 - 2.00 / 0.00 - 20.00 / 0.0 - 100.0 MΩ・cm
Ambient environmentTemperature: -5°C to 45°C, Relative humidity: 20% to 85% (without dew condensation)
Power supplyRated voltage 24 V DC, 10 W (max)
Protective structurePanel: IP65, Rear case: IP20, Terminal: IP00 (Indoor-use panel installation type)
External dimensions96 (W) × 96 (H) × 115 (D) mm, Case depth : approx. 105 mm (when panel-mounted)
WeightApprox. 550 g
Conforming standardsCE marking, FCC Part15
Compatible sensorsERF-series specific resistance GC (Glass carbon) sensor

Schematics

Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process
Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process

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