Low Concentration Type HF/HCl/NH3 Concentration Monitor HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor HF-960M

The HF-960M uses sensors that offer outstanding corrosion resistance for high-precision, high-speed measurement of low concentrations of hydrofluoric acid, hydrochloric acid and ammonia, and is thus perfect for single-bath and wafer cleaning. The HF-960M is also an environmentally-friendly product that uses lead-free solder for mounting chips on the PCB.

 

Segment: Semiconductor
Division: Wet Process Control
Base product
Manufacturing Company: HORIBA Advanced Techno Co. Ltd.

 

  • Precise measurement of low HF concentrations
  • 5 types of measurement available
    HF, HCl & NH3 concentrations, conductivity, and temperature
  • The analog output range can be arbitrarily set with to the concentration measuring range
  • The HF-960M provides 7 output points
  • 3-channel transmission output
  • RoHS compliant
  • DC 24 V Power Source
  • CE Marking compliant

 

 

Product name

Low Concentration Type HF / HCl / NH3 Concentration Monitor

Model

HF-960M

Measurement rangeHF: 0 - 5000 ppm, HCl: 0 - 5000 ppm, NH3: 0 - 10000 ppm, Conductivity:0 - 50.0 mS/cm

Power supply

Rated voltage 24 V DC, 10 W (max)

Structure

Iindoor-use, panel installation type, panel case : ABS, terminal : PBT, Panel : IP65 dust and water proof structure

External dimensions

96 (W) x 96 (H) x 115 (D) mm, Case depth : approx.105 (when panel-mounted)

Weight

Approx. 550 g

Conforming standards

CE marking, FCC Part15

Compatible sensors

FS-10F series flow-type sensor

Schematics

Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process
Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process
Semiconductor BEOL CMP in Semiconductor Manufacturing Process
Semiconductor BEOL CMP in Semiconductor Manufacturing Process
Readout47-Conductivity Meter with Carbon Electrodes and Application for Densitometers
CategoryDocuments
Size 1.8 MB
FiletypePDF

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