- High Accuracy ±1.0% S.P.
This mass flow controller's linearity is compensated by a polynomial approximated curve and achieves high accuracy for all flow control ranges. For the purpose of advancement of actual gas accuracy, the calibration data of various process gases are measured by HORIBA STEC's standard gas measurement system.
- High Speed Response
Installed with the "Variable PID system", which can achieve 1 second response between any two set points. Variable PID is continuously changing depending on the flow point setting. This allows the PID factor to be optimized when the full scale flow and gases are changed.
- Multi-Gas/Multi-Range Solution
The configuration software makes it possible to change specifications quickly and easily. One key feature is the changes can be made without removing the mass flow controller from the gas panel or piping. This reduces the number of spare mass flow controllers required; saving both time and costs.
The Mass Flow Controller SEC-Z500X is suitable for various applications as well as semiconductor manufacturing. Read our Case Study and find out how the SEC-Z500X improved results for The Natioanl Oceanic & Atmospheric Administration: Case Study