SEC-Z500X

Multi Range/Multi Gas Digital Mass Flow Controller SEC-Z500X

Multi Range/Multi Gas Digital Mass Flow Controller

This is HORIBA's best selling model for digital mass flow controllers. It has multi-range/multi-gas functions enabling users to change the type of gas or full-scale flow rate on-site quickly and easily.
With high accuracy +/- 1.0% S.P,  piezo actuator valve, high speed response and being all-metal this mass flow controller is suitable for process yield improvement and simplified parts management. Digital/Analog, DeviceNet™, and EtherCAT® communications are all available.

View our MFC comparison chart here.

 

 

Segment: Semiconductor
Division: Fluid Control
Base product
Manufacturing Company: HORIBA STEC, Co., Ltd.
  • High Accuracy ±1.0% S.P.
    This mass flow controller's linearity is compensated by a polynomial approximated curve and achieves high accuracy for all flow control ranges. For the purpose of advancement of actual gas accuracy, the calibration data of various process gases are measured by HORIBA STEC's standard gas measurement system.
  • High Speed Response
    Installed with the "Variable PID system", which can achieve 1 second response between any two set points. Variable PID is continuously changing depending on the flow point setting. This allows the PID factor to be optimized when the full scale flow and gases are changed.
  • Multi-Gas/Multi-Range Solution
    The configuration software makes it possible to change specifications quickly and easily. One key feature is the changes can be made without removing the mass flow controller from the gas panel or piping. This reduces the number of spare mass flow controllers required; saving both time and costs.

The Mass Flow Controller SEC-Z500X is suitable for various applications as well as semiconductor manufacturing. Read our Case Study and find out how the SEC-Z500X improved results for The Natioanl Oceanic & Atmospheric Administration: Case Study

Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Optical Fiber Manufacturing Process in Electrical Equipment
Optical Fiber Manufacturing Process in Electrical Equipment
Gas Mass Flow Control and Measurement in Research and Testing Laboratories
Gas Mass Flow Control and Measurement in Research and Testing Laboratories
Sterilization Process in Food and Beverage Manufacturing
Sterilization Process in Food and Beverage Manufacturing
Multi Range/Multi Gas Digital Mass Flow Controller SEC-Z500X Series_Case study
CategoryDocuments
Size 0.33 MB
FiletypePDF

REQUEST FOR INFORMATION

Do you have any questions or requests? Use this form to contact our specialists.

Product accessories

Control unit PE-D20
MoreControl unit PE-D20
Conversion adapters CA series
MoreConversion adapters CA series
Dedicated power sources PE Series
MoreDedicated power sources PE Series
Display unit DU series
MoreDisplay unit DU series
Mass Flow Checker MFT-20
MoreMass Flow Checker MFT-20
Monitor unit PE-D10
MoreMonitor unit PE-D10
PE-S7
MorePE-S7
Signal cables and conversion adapters SC series
MoreSignal cables and conversion adapters SC series
SU-503ED/502EA
MoreSU-503ED/502EA

Related products

EC-5000 Series
MoreEC-5000 Series
Exhaust Pressure Controller
EV-140C
MoreEV-140C
Optical Emission Spectroscopy Etching End-point Monitor
FDM Series
MoreFDM Series
POCl3 Auto Refill System
IR-400
MoreIR-400
High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring
LE Series
MoreLE Series
Large Flow Liquid Source Vaporization Control System
LF-F/LV-F Series
MoreLF-F/LV-F Series
Digital Liquid Mass Flow Meters / Controllers
LSC series
MoreLSC series
Compact Baking System
LU Series
MoreLU Series
Liquid Auto Refill System
MI-1000/MV-1000
MoreMI-1000/MV-1000
Mixed Injection System Liquid Vaporizers
MICROPOLE System
MoreMICROPOLE System
Compact Process Gas Monitor
MV-2000 Series
MoreMV-2000 Series
Mixed Injection System Liquid Vaporizer
PV Series
MorePV Series
Piezo Actuator Valve
SEC-400 series
MoreSEC-400 series
Mass flow controllers
SEC-8000 F/D/E Series
MoreSEC-8000 F/D/E Series
High Temperature Digital Mass Flow Controller
SEC-E Series
MoreSEC-E Series
Mass Flow Controller
SEC-N100 Series
MoreSEC-N100 Series
Digital Mass Flow Controller
SEC-R100 Series
MoreSEC-R100 Series
Digital Mass Flow Controller
UR-Z700 series
MoreUR-Z700 series
Digital Automatic Pressure Regulator
VC Series
MoreVC Series
Direct Liquid Injection System
VG Series
MoreVG Series
Capacitance Manometer
CRITERION D500
MoreCRITERION D500
Pressure Insensitive Mass Flow Module
CVS-ONE
MoreCVS-ONE
Constant Volume Sampler
EXFM-ONE
MoreEXFM-ONE
Ultrasonic Exhaust Flow Meter
FDM Series
MoreFDM Series
POCl3 Auto Refill System
LE Series
MoreLE Series
Large Flow Liquid Source Vaporization Control System
LF-F/LV-F Series
MoreLF-F/LV-F Series
Digital Liquid Mass Flow Meters / Controllers
LSC series
MoreLSC series
Compact Baking System
LU Series
MoreLU Series
Liquid Auto Refill System
MI-1000/MV-1000
MoreMI-1000/MV-1000
Mixed Injection System Liquid Vaporizers
MV-2000 Series
MoreMV-2000 Series
Mixed Injection System Liquid Vaporizer
SEC-400 series
MoreSEC-400 series
Mass flow controllers
SEC-8000 F/D/E Series
MoreSEC-8000 F/D/E Series
High Temperature Digital Mass Flow Controller
SEC-E Series
MoreSEC-E Series
Mass Flow Controller
SEC-N100 Series
MoreSEC-N100 Series
Digital Mass Flow Controller
SEC-R100 Series
MoreSEC-R100 Series
Digital Mass Flow Controller
SEC-Z700X Series
MoreSEC-Z700X Series
Pressure Insensitive Mass Flow Controller
VC Series
MoreVC Series
Direct Liquid Injection System
XF-100 Series
MoreXF-100 Series
Digital Liquid Mass Flow Meters
LF-F/LV-F Series
MoreLF-F/LV-F Series
Digital Liquid Mass Flow Meters / Controllers
SEC-400 series
MoreSEC-400 series
Mass flow controllers
SEC-8000 F/D/E Series
MoreSEC-8000 F/D/E Series
High Temperature Digital Mass Flow Controller
SEC-E Series
MoreSEC-E Series
Mass Flow Controller
SEC-N100 Series
MoreSEC-N100 Series
Digital Mass Flow Controller
SEC-R100 Series
MoreSEC-R100 Series
Digital Mass Flow Controller
SEC-Z700X Series
MoreSEC-Z700X Series
Pressure Insensitive Mass Flow Controller