Stand-alone Type Chemical Concentration Monitor CS-100 Series

CS-100 Seriesr, CS-137-153-152-150-100-153N-139E

 

The CS-100 Series monitors measure in real time the concentrations of various types of chemical solutions and have the capability to control the timing of automatic chemical spiking.

Measurement is fully automatic; no measurement control is required once the measurements have begun. The operator needs only to prepare the chemical solution. In addition, air is used for the reference spectral measurements to be taken without abnormalities in the solution flow.

 

 

Segment: Semiconductor
Division: Wet Process Control
Base product
Manufacturing Company: HORIBA Advanced Techno Co. Ltd.

 

  • Concentration follow-up in real-time
  • Fully automatic measurements
  • Comprehensive measure to eliminate air bubble during sequential measurements

 

Model name

CS-100
Measurement principleAbsorption spectroscopic method
Sample temperature20 to 30 Degree C
Ambient temperature20 to 25 Degree C
ComponentsMax. 4 components
Chemical rangeMax. 4 ranges
CommunicationParallel I/O, Analog output, RS-232C
Analog output
(4-20 mA)
Max. 2 components
Dimension205(W) X 329(D) X 269(H)mm
Power sourceDC 24V
Consumable partsHalogen lamp
WavelengthUV/NIR
Wetted materialPTFE, PFA, Sapphire or Quartz

Schematics

 

 

Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process
Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process
Readout47_Industrial_In-line_and_Multi_Component_Monitor_Using_Absorption_Spectroscopy_and_Its_Application
CategoryDocuments
Size 1.61 MB
FiletypePDF

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