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FPD Manufacturing Process

FPD Process

HORIBA have fostered various analysis, control, and evaluation technologies for the silicon semiconductor manufacturing processes; a field where strict specifications must be satisfied.

HORIBA makes full use of these technologies in the field of FPD processing. These technologies provide manufacturing support for various types of processes, including gas and liquid medication composition, the detection of particles on masks and thin film measurement. These technologies are also being applied to high-performance analytical and control equipment that supports the research and development of PDPs, organic EL, FEDs, and the diversifying and evolving field of FPDs.

FPD Manufacturing Process

Browse Products

51 series
51 series

방폭형 가스 분석기

CS-100 Series
CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-600F
CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-700
CS-700

High Precision, High Stability Chemical Concentration Monitor

EV 2.0 Series
EV 2.0 Series

X선 분석 현미경 초대형 챔버 모델

FS-3000
FS-3000

Thermal Flow Splitter

GD-Profiler 2™
GD-Profiler 2™

Glow Discharge Optical Emission Spectrometer

IR-400
IR-400

High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring

LabRAM HR Evolution
LabRAM HR Evolution

Confocal Raman Microscope

MICROPOLE System
MICROPOLE System

Compact Process Gas Monitor

Partica LA-960V2
Partica LA-960V2

레이저 산란 입자 크기 분포 분석기

Process
Process

Process Analyzer System

SEC-N100 Series
SEC-N100 Series

Digital Mass Flow Controller

UVISEL 2 VUV
UVISEL 2 VUV

A versatile spectroscopic ellipsometer covering a large range from VUV to NIR

VA-5000
VA-5000

범용 멀티 가스 분석기

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