PLIMA-LED

Micro Photoluminescence Imaging System

PLIMA-LED is a next-generation photoluminescence solution that integrates PL, AOI, and spectral analysis into a single platform, enabling precise optical inspection, yield analysis, and seamless integration with manufacturing execution systems.

Segment: Semiconductor
Division: Metrology

Integrated PL, AOI, and Spectrum Analysis

  • PL Image
    • Detection Items:
      - Intensity: High/Low/No Signal
      - Chip Luminance: Average/Total
      - Standard Deviation/Coefficient of Variation (CV)
    • Chip Size ≥ 10 μm, Pitch ≥ 20 μm, Gap ≥ 3.5 μm
       
  • AOI
    • Detects surface defects, cracks, pattern misalignment, and positioning errors
      Minimum detectable chip size: 1.5 μm
      Achieves composite judgment based on AOI and PL information
       
  • Spectrum Analysis
    • Key spectrum parameters:
      - Wp (Peak Wavelength)
      - FWHM (Full width at half maximum)
      - II (Integrated intensity), Ip (Peak intensity)
    • Pitch Resolution
      - 0.5 mm (4-inch wafer), 1.0 mm (6-inch wafer), 2.0 mm (8-inch wafer)
       

 

General Specification

General Scan method Spiral scan with 1800 RPM rotation and linear motion
Wafer 4＂, 6＂
Stage XY-axis Linear stage, Z axis stage
R stage with 1800RPM (Max)
Measurement Objective Lens 5X, 10X, 20X, 50X
Laser excitation without objective lens (Option)
Image Camera Resolution : 2048 x 2048 (4M pixel)
Pixel size : 5.5 um x 5.5 um
Optical Fiber 400 um bundle core
PMT Port 1 (PMT 1) : PL Inspection with bandpass filter
Port 2 (PMT 2) : Reflection (Scattering)
Spectrometer Groove Density : 300 lines/ mm
Spectral range (nm) : 210 – 2100
Pixel (ea) : 2048 x 64
Dispersion : 0.44 nm / pixel
Excitation Source 50 mW 375 nm Laser (for Blue, Green LED)
50 mW 532 nm Laser (for Red LED)
Measurement speed   4inch 6inch
PMT Mapping
(2 channel at same time, 5um step)		 8pcs / 1H 6pcs / 1H
PMT Mapping & Spectrum mapping
(Optional measurement)		 7 pcs / 1H
(PMT : 5um / Spectrum : 2mm )		 7 pcs / 1H
(PMT : 5um / Spectrum : 4mm )
Micro Spectrometer mapping 3,600 points / hour Step : Min. 2um
Dimension (mm) 2000 (w) x 1400 (d) x 2000 (h)

Utility

Operating Environment Place Clean Room (class ~ 10000)
Temperature 15 ~ 35° C
Humidity <85% RH with no condensation
Utility Dimensions 1500 mm x 2000 mm x 2300 mm, incl. HEPA filter
Weight 1760 Kg
Input Voltage 220V±10% 50/60Hz single phase
Full load current 47A
Vacuum1 40L/min, -80KPa
Pipe size : Outer diameter 6mm
Vacuum2 120L/min, -40KPa
Pipe size : Outer diameter 6mm
Air 90L/min, 0.5MPa
Pipe size : Outer diameter 6mm

 

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