High Temperature Digital Mass Flow Controller SEC-8000 F/D/E Series

High Temperature Digital Mass Flow Controller SEC-8000 F/D/E Series
High Temperature Digital Mass Flow Controller SEC-8000 F/D/E Series

The SEC-8000F/D/E series can operate in high temperature environments, from 15 ℃ to 120 ℃, for a variety of tasks including semiconductor and compound semiconductor processing.

View our MFC comparison chart here.

 

 

Segment: Semiconductor
Division: Fluid Control
Base product
Manufacturing Company: HORIBA STEC Co. Ltd.
  • Equipped with digital facility: high accuracy- ±1.0% S.P.
  • High Speed Responce
  • Ultra Clean
  • RoHS Compliance

 

 

Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Gas Mass Flow Control and Measurement for Reference Value of PM2.5 Measurement
Gas Mass Flow Control and Measurement for Reference Value of PM2.5 Measurement
Optical Fiber Manufacturing Process in Electrical Equipment
Optical Fiber Manufacturing Process in Electrical Equipment
Test Gas Generation in Research and Testing Laboratories
Test Gas Generation in Research and Testing Laboratories
High Temperature Digital Mass Flow Controller SEC-8000 F/D Series Specifications
CategoryDocuments
Size 0.53 MB
FiletypePDF

REQUEST FOR INFORMATION

Do you have any questions or requests? Use this form to contact our specialists.

Product accessories

Control unit PE-D20
MoreControl unit PE-D20
Conversion adapters CA series
MoreConversion adapters CA series
Dedicated power sources PE Series
MoreDedicated power sources PE Series
Display unit DU series
MoreDisplay unit DU series
Mass Flow Checker MFT-20
MoreMass Flow Checker MFT-20
Monitor unit PE-D10
MoreMonitor unit PE-D10
PE-S7
MorePE-S7
Signal cables and conversion adapters SC series
MoreSignal cables and conversion adapters SC series
SU-503ED/502EA
MoreSU-503ED/502EA

Related products

Compact Baking System LSC series
MoreCompact Baking System LSC series
Digital Mass Flow Controller SEC-N100 Series
MoreDigital Mass Flow Controller SEC-N100 Series
Direct Liquid Injection System VC Series
MoreDirect Liquid Injection System VC Series
EV-140C
MoreEV-140C
Optical Emission Spectroscopy Etching End-point Monitor
Exhaust Pressure Controller EC-5000 Series
MoreExhaust Pressure Controller EC-5000 Series
GA-370
MoreGA-370
Trace Gas Monitor
Large Flow Liquid Source Vaporization Control System LE Series
MoreLarge Flow Liquid Source Vaporization Control System LE Series
LF-F/LV-F Series
MoreLF-F/LV-F Series
Digital Liquid Mass Flow Meters / Controllers
Liquid Auto Refill System LU Series
MoreLiquid Auto Refill System LU Series
Mass Flow Controller SEC-E Series
MoreMass Flow Controller SEC-E Series
MI-1000/MV-1000
MoreMI-1000/MV-1000
Mixed Injection System Liquid Vaporizers
MICROPOLE System
MoreMICROPOLE System
Compact Process Gas Monitor
Mixed Gas Generators MU Series (MU-2200)
MoreMixed Gas Generators MU Series (MU-2200)
Mixed Injection System Liquid Vaporizer MV-2000 Series
MoreMixed Injection System Liquid Vaporizer MV-2000 Series
Multi Range/Multi Gas Digital Mass Flow Controller SEC-Z500X
MoreMulti Range/Multi Gas Digital Mass Flow Controller SEC-Z500X
Piezo Actuator Valve PV Series
MorePiezo Actuator Valve PV Series
POCl3 Auto Refill System FDM Series
MorePOCl3 Auto Refill System FDM Series
Test Gas Generation Systems TU Series
MoreTest Gas Generation Systems TU Series
UR-Z700 series
MoreUR-Z700 series
Digital Automatic Pressure Regulator
CRITERION D500
MoreCRITERION D500
Pressure Insensitive Mass Flow Module
Digital Mass Flow Controller SEC-N100 Series
MoreDigital Mass Flow Controller SEC-N100 Series
Mass Flow Controller SEC-E Series
MoreMass Flow Controller SEC-E Series
Multi Range/Multi Gas Digital Mass Flow Controller SEC-Z500X
MoreMulti Range/Multi Gas Digital Mass Flow Controller SEC-Z500X
SEC-400 series
MoreSEC-400 series
Mass flow controllers
SEC-R100 Series
MoreSEC-R100 Series
Digital Mass Flow Controller
SEC-Z700X Series
MoreSEC-Z700X Series
Pressure Insensitive Mass Flow Controller
Digital Mass Flow Controller SEC-N100 Series
MoreDigital Mass Flow Controller SEC-N100 Series
LF-F/LV-F Series
MoreLF-F/LV-F Series
Digital Liquid Mass Flow Meters / Controllers
Mass Flow Controller SEC-E Series
MoreMass Flow Controller SEC-E Series
Multi Range/Multi Gas Digital Mass Flow Controller SEC-Z500X
MoreMulti Range/Multi Gas Digital Mass Flow Controller SEC-Z500X
SEC-400 series
MoreSEC-400 series
Mass flow controllers
SEC-R100 Series
MoreSEC-R100 Series
Digital Mass Flow Controller
SEC-Z700X Series
MoreSEC-Z700X Series
Pressure Insensitive Mass Flow Controller