General Specification
| General | Scan method | Spiral scan with 1800 RPM rotation and linear motion | ||
| Wafer | 4＂, 6＂ | |||
| Stage | XY-axis Linear stage, Z axis stage R stage with 1800RPM (Max) | |||
| Measurement | Objective Lens | 5X, 10X, 20X, 50X Laser excitation without objective lens (Option) | ||
| Image Camera | Resolution : 2048 x 2048 (4M pixel) Pixel size : 5.5 um x 5.5 um | |||
| Optical Fiber | 400 um bundle core | |||
| PMT | Port 1 (PMT 1) : PL Inspection with bandpass filter Port 2 (PMT 2) : Reflection (Scattering) | |||
| Spectrometer | Groove Density : 300 lines/ mm Spectral range (nm) : 210 – 2100 Pixel (ea) : 2048 x 64 Dispersion : 0.44 nm / pixel | |||
| Excitation Source | 50 mW 375 nm Laser (for Blue, Green LED) 50 mW 532 nm Laser (for Red LED) | |||
| Measurement speed | 4inch | 6inch | ||
| PMT Mapping (2 channel at same time, 5um step) | 8pcs / 1H | 6pcs / 1H | ||
| PMT Mapping & Spectrum mapping (Optional measurement) | 7 pcs / 1H (PMT : 5um / Spectrum : 2mm ) | 7 pcs / 1H (PMT : 5um / Spectrum : 4mm ) | ||
| Micro Spectrometer mapping | 3,600 points / hour Step : Min. 2um | |||
| Dimension (mm) | 2000 (w) x 1400 (d) x 2000 (h) | |||
Utility
| Operating Environment | Place | Clean Room (class ~ 10000) |
| Temperature | 15 ~ 35° C | |
| Humidity | <85% RH with no condensation | |
| Utility | Dimensions | 1500 mm x 2000 mm x 2300 mm, incl. HEPA filter |
| Weight | 1760 Kg | |
| Input Voltage | 220V±10% 50/60Hz single phase | |
| Full load current | 47A | |
| Vacuum1 | 40L/min, -80KPa Pipe size : Outer diameter 6mm | |
| Vacuum2 | 120L/min, -40KPa Pipe size : Outer diameter 6mm | |
| Air | 90L/min, 0.5MPa Pipe size : Outer diameter 6mm |
