Vacuum System
The VUV Reflectance system consists of a VUV light source combined with a monochromator. The samples are mounted in a 6 positions sample wheel in the center of a theta-2 theta reflectometer and an internal CCD is making reflectivity measurements for deviation angles going from 5° to 175°. Transmission measurement can also be done by putting the detector in line with the incident beam (straight measurement).
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