D700T

Best Performance Pressure Insensitive Mass Flow Module

D700T is the best performance pressure-insensitive mass flow module designed for critical semiconductor manufacturing process. D700T adapted the HORIBA CRITERION pressure-based flow measure and control technology to provide industry leading repeatable and accurate performance. In addition, uniqueness of D700T is utilizing a patented advanced flow control algorithm with twin valve structure which enables customer's gas delivery system to solve multiple challenges.

事业部: 半导体

产品分类: 流体控制

制造商: HORIBA STEC, Co., Ltd.

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概要
配置

≤ 100 msec fast settling time across-the-board (Set to Set, Step up and Step down)
Inlet and outlet pressure insensitive performance
Advanced failure detection to diagnose pressure sensor shift, valve seat leak and flow accuracy change
Within 0.15 %S.P. repeatability
Best accuracy specification is within 0.45 %S.P.* (Standard: 0.8 %S.P.)
Wider Operating Temperature Range (15-60 °C)

*Note: D700T is single gas configuration. Ask Horiba for specification.

Go to External Drawing

＊1 Flow rate accuracy can be guaranteed down to 0.1 SCCM N2 equivalent.
＊2 This is guaranteed value under 25 ℃ and ≤ 1 × 10-3 Pa (A).
＊3 Setting time is MFC output signal and N2 gas at 25 ℃. Definition of setting time is 2 %S.P. or 0.05 %F.S. of the change in setting, whichever is larger. However, if the change in setting is less than 0.5 %F.S., 50 % of the change in setting.
＊4 Pressure perturbation has to be smaller than 20 % pressure change per second and ±70 kPa/sec. (±10 PSI/sec.)
＊5 Zero adjustment is required to eliminate orientation influence after installation.
＊6 EtherCAT® is a registered trademark and patented technology, licensed by Beckhoff Automation GmbH in Germany.