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〈カタログ〉PLATO Series
| Model | OPM-300T | OPM-300T-IRBF | OPM-300R |
| H/W General | Multi sample loading system | ||
| 4 axis motorized stage (XY,Tray,R) | 5 axis motorized stage (XY,Tray,R1,R2) | ||
| Automatically adjustable incidenct angle (Variable AOI between, 300T, 300T-IRBF : 0-45°, 300R : 5-35°) | |||
| Measurable Range | 350-1300 nm | 800-1100 nm | 380-800 nm |
| CCD Pixel Dispersion | 1st : Approx. 0.43 nm 2nd(1100nm~) : Approx. 2.34nm | Approx. 0.2 nm | Approx. 0.21 nm |
| Light Source | UV lamp, Tungsten halogen lamp | Tungsten halogen lamp | |
| Measurement Item | Wavelength at T(R)n%, T(R)% at n wavelength, T(R) Avg/Max/Min, Slope, Δwavelength of different incident angle | ||
| Repeatability / Reproducibility | Related with λ item : 1st ≤±0.3 nm, 2nd(300T only) ≤±1 nm Related with T% item : ≤±0.4% | Related with λ item : 1st ≤±0.3 nm Related with R% item : ≤±0.25% | |
| S/W General | Operator, Engineer, Maintenance mode | ||
| Mapping & Multi Point Measure function by user recipe | |||
| Measurement Capa. ( 1point/filter, 1 angle) | Approx. 216,000 pcs/month(24h x 30d) | ||
| Operating Environment | Place : Clean Room (Class -10,000) | ||
| 15-35℃ | |||
| < 85% RH with no condensation | |||
| Dimension (WxDxH) | 1230 x 1515 x 1142 mm | 1550 x 1515 x 1142 mm | |
| Weight | Approx. < 400 kg | Approx. < 450 kg | |
| Power Spec. | Single phase, 220 V, 15 A | ||
