Multichannel Spectrometer and Hyperspectral Line Imager

HORIBA has developed a high-performance rugged spectroscopy platform that is factory-configurable for use in a multichannel or hyperspectral imaging system. This system can be configured with our Sylent® 2D sCMOS camera, low-cost cameras, or even customer-supplied sensors. In hyperspectral imaging applications, this system can be used as a line-scanning instrument (push-broom) that collects full spectral data simultaneously across the input slit height.

Variations

Multichannel (M135) vs. lens-based or bare slit (H135)

Two gratings to choose from: UV-NIR or VIS-NIR

Default sensors are the Sylent sCMOS cameras (cooled to -25° C or uncooled), or any customer preferred sensor

For OEM Industrial Applications

Optical Emission Spectroscopy (OES)

Fluorescence

Hyperspectral Line Imaging

Semiconductor Inspection and Metrology

Semiconductor Process Monitoring

Aerial Reconnaissance

*Available in select countries.

You can email OEM Technical Sales at: OEM.US(at)horiba.com or contact OEM at: +1.732.494.8660 Ext. 7733

Features
Specifications

Up to 96 fiber channels with simultaneous readout (factory configurable)
Ultraviolet hyperspectral line imaging (180-1050 nm)
High throughput combined with low stray light
2D scientific CMOS with high quantum efficiency and low noise

Spectral Line Width Graphs

The wavelength resolution specification establishes the maximum width (FWHM) of all spectral lines on all channels. This is a more stringent requirement than using the mean as the specification.

A lens-based hyperspectral H135’s resolution is dependent on the grating, slit, and f/# of the lens used.

OEM Spectrometer Selection Guide

View and Download our OEM Spectrometer Selection Guide

You can email OEM Technical Sales at: OEM.US(at)horiba.com or contact OEM at: +1.732.494.8660 Ext. 7733

General Spectrometer Specifications

PoliSpectra 135	VIS-NIR Grating	UV-NIR Grating
Grating Efficiency Range (nm)	300-1050	185-900
Configurable Range	Sensor dependent; see spectral range table
F/#	F/2.3
Focal Length (nm)	135.0
Spectral Resolution (20 μm slit) (nm) ¹	1.0	2.0
Grating Dispersion (nm/mm)	34.7
Grating Blaze (nm)	575	280
Grating Groove Density (lines/mm)	401	239
Weight (no camera) (lbs.)	4.7
Weight (with uncooled camera) (lbs.)	6.0
Weight (with cooled camera) (lbs.)	10.4
Max Keystone (μm)	<15
Spectral Tilt (μm) ²	<15
Crosstalk (%) ³	<1.5	<1.7
Stray Light (%) ⁴	<0.2	<0.3
Multichannel Fiber Configuration
Multichannel Fibers	up to 96
Wavelength Accuracy (nm)	<0.1
Smile (μm) ⁵	NA
Line Imaging Configuration
Lens Option	c-mount
Max Spatial Image Height (mm)	20.0
Magnification	1:1
Wavelength Accuracy (nm)	<0.4
Spatial Resolution (μm)	6.0	9.0
Smile (μm) (line imaging)	<15

¹ Max spectral line width (FWHM) for all peaks in the image.
² Versus a sensor row.
³ The Crosstalk % can be further reduced with more dead space between channels. Measured on one channel (off), with all other channels illuminated. See Cross Talk Calculation figure on pages following.
⁴ Stray light measured using a BP filter: Baseline light level (outside the band) divided by the BP peak (unsaturated).
⁵ Smile is eliminated by using channel calibration coefficients.

Spectral Resolution vs. Slit Size

Best Spectral Resolution (nm)*
Slit Width (μm)	22	35	45	100	200
UV-NIR Grating (280 nm blaze)	2.0	2.7	5.3	6.5	12.3
VIS-NIR Grating (575 nm blaze)	1.0	1.5	1.9	3.8	7.2

* Ignoring pixel limitations, which are sensor-dependent. Specification is the maximum width (FWHM) of all spectral lines on all channels (or rows) on the image. Any size slit is orderable (for OEM quantities).

Spectral Range vs. Grating and Sensor Choice

	VIS-NIR				VIS-NIR
Sensor	Digital Resolution (nm/px)*	Range (nm)	Low Example (nm)	High Example (nm)	Digital Resolution (nm/px)*	Range (nm)	Low Example (nm)	High Example (nm)
1.3 MP-XX-9.76-BI	0.3	434	300-734	616-1050	0.6	727	200-927	323-1050
1.3 MP-XX-9.76-BI	0.2	462	300-762	588-1050	0.4	775	200-975	275-1050
1.3 MP-XX-9.76-BI	0.4	782	300-1050		0.6	1311	200-1050
IMX174	0.2	394	400-794		0.3	660	TBD

*Average digital resolution AKA digital dispersion

Sensor Options

						Read Noise (median)
Name	Sensor Type	Effective Pixels	Pixel Size (μm)	Active Pixels	Active Photosensitive Area (mm)	STD (e-)	CMS (e-)	ADC (bits)	Shutter	Full Well	Dynamic/Range (dB)	QE	Cooling
Name	Sensor Type	Effective Pixels	Pixel Size (μm)	Active Pixels	Active Photosensitive Area (mm)			ADC (bits)	Shutter	Full Well	Dynamic/Range (dB)	QE	Cooling
1.3 MP-XX-9.76-BI	Back-illuminated sCMOS	1.3 MP	9.76 x 9.76	1024 x 1280	9.994 x 12.493	1.6	0.9	12, 16 (HDR-mode), 32 ¹	Rolling	48 ke-	90.0	Up to 90%	Uncooled or -25° C
4.2 MP-XX-6.5-BI	Back-illuminated sCMOS	4.2 MP	6.5 x 6.5	2048 x 2048	13.312 x 13.312	1.6	1.2	12, 16 (HDR-mode), 32 ²	Rolling	53 ke-	89.5	Up to 95%	Uncooled or -20° C
4.2 MP-XX-11-BI	Back-illuminated sCMOS	4.2 MP	11 x 11	2048 x 2048	22.528 x 22.528	1.6	N/A	12, 16 (HDR-mode), 32 ²	Rolling	80 ke-	93.9	Up to 95%	Uncooled or -20° C
IMX174	CMOS	2.3 MP	5.86 x 5.86	1216 x 1936	7.126 x 11.345	7.4		10, 12	Global	30 ke-	71.7	Up to 78%	Uncooled

¹ In binned spectra mode.
² In binned spectra mode (roadmap).

Other sensor options:
EMCCD
CCD (eshutter)
Customer sensors (factory installed only)

Input Options

			Speed (FPS)
Input Examples Other configurations available upon request	Fiber Type	Throughput	1.3 MP-XX-9.76-BI¹	4.2 MP-XX-6.5-BI¹	4.2 MP-XX-11-BI¹
Input Examples Other configurations available upon request	Fiber Type	Throughput	1.3 MP-XX-9.76-BI¹	4.2 MP-XX-6.5-BI¹	4.2 MP-XX-11-BI¹	Sony IMX174²	Notes
Single Channel	Round-to-Line	Extreme	20	36	23	664
4-Channels	200 μm	Good	198	155	164	322
4-Channel High Throughput (OES Multitrack)	Bundle	Very Good	64	58	62	165
8-Channels	200 μm	Good	107	132	141	284
18-Channels	100 μm	Low	41	96	106	212
34-Channels	70 μm	Low	23	53	58	N/A
34-Channels	100 μm	Low	24	57	62	N/A
Imaging Fiber	4 μm x 100 k fibers	Meduim	134	332	358	586	VIS Only (365 nm +)
Full Chip Hyperspectral Line Imaging (Lens or Bare Slit)	N/A	Depends on # of rows binned	20	36	23	664	Slit to camera imaging is 1:1