椭圆偏振仪

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核心技术

椭圆偏振法

Spectroscopic Ellipsometry Principles

Ellipsometry is a versatile thin film characterization technique that has applications in many different fields. This sensitive measurement technique provides unequalled capabilities for thin film metrology, and provides thin film thickness with angstrom resolution. As an optical technique, spectroscopic ellipsometry is non-destructive and contactless.