PLATO Series

Automatic Photoluminescence Mapping System

PLATO-LED

Automatic Photoluminescence Mapping System

 

General Spec

  • Photoluminescence Mapping : Peak wavelength, Peak intensity, Integrated intensity, FWHM, Al contents in AlGaN layer
  • Thickness mapping : Thin-film thickness of GaN layer
  • Bow measurement (optional)
  • 2”, 3”, 4”, 150mm, 200mm SEMI standard wafer
  • 300mm SEMI standard wafer (optional)
  • 3 lasers available : 213nm, 266nm, 325nm, 375nm, 405nm, 532nm, 980nm, 1064nm, etc.
  • Auto focus function to measure wafers of various thicknesses without modifying the measurement recipe
  • Excel, CSV export with flexible form
  • SECS/GEM, MES compatible
  • The most popular PL mapping system sold more than 250 units worldwide (9 countries, 63 customers)

 

Segment: Semiconductor
Division: Metrology

PLATO GaN Power Device/UV-C

Automatic Photoluminescence Mapping System

 

PLATO data: UV-C with 213nm laser

 

PLATO data: GaN Power device Al% with 266nm laser

 

Bow measurement with Displacement sensor

 

PLATO VCSEL and NIR LD

Automatic Photoluminescence Mapping System

 

PLATO data: 940nm VCSEL

 

 

PLATO data: NIR for optical communication and gas sensor

 

Special functions of PLATO

Light sourceUV213nm, 266nm, 325nm
VIS375nm, 405nm, 532nm
NIR980nm, 1064nm
Measurement ItemDBR MeasurementVisible range, NIR range
Bow Measurement10~1000um
Laser MarkingCE-CoC, CE-DoC, KCs, S-MarkSapphire, Si, GaAs
Wafer TransferRobot typeSingle-arm, Dual-arm
Cassette mapping sensor
Wafer sizeSEMI standard 2”, 3”, 4”, 6”, 8”, 12”
Cassette typeOpen Cassette, SMIF, FOUP
IdentificationWafer ID reader, Cassette ID reader
CertificationCE-CoC, CE-DoC, KCs, S-Mark
Etc.SECS/GEM
Size: 1.42 MB
PLATO Series Brochure

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