Getting high resolution data on the size distribution of CMP slurries is essential for tracking the polishing performance, with small amounts of undersize or oversize populations making the difference between a good batch and a bad batch. Measurement techniques like laser diffraction and dynamic light scattering struggle to display high enough resolution data to resolve these tail ends of the distribution, requiring a higher resolution technique to visualize the entire distribution for CMP slurries.
In this application note, Fuso PL1 colloidal silicas were measured using the ViewSizer 1000 Nanoparticle Tracking Analyzer to investigate its ability to visualize small particles with lower scattering properties, and to check the resolution capabilities in identifying trace oversize particles.
Multi-Variable Pulse Nanoparticle Tracking Analysis (NTA)
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