Wafer

• Precise stage positioning for loading sample and analysis: the app automatically moves the stage to a safe loading position, then centers the sample for measurement with a single click.
   
• Creation of acquisition and analysis templates: the user can build personalized templates to instantly restore preferred settings and ensure consistent, repeatable workflows.
   
• Versatile sampling schemes: the app supports full‑map scans, 49‑point patterns, grid sampling, stars and more—while allowing users to set scan parameters and select the most suitable autofocus mode.
   
• Various autofocus modes: the app offers multiple autofocus modes—reflection, spectral, pre‑recorded topography, or mid‑scan tilt correction—allowing users to select the optimal compromise between acquisition time and accuracy.
   
• Easy zoom‑area selection:  the app allows to locate and scan a specific grid region from a pre‑recorded full‑wafer map for precise defect inspection.
   
• Real‑time analytics supported by multiple visualization: The system applies template‑specified conditions to process data in real time and outputs results across multiple visualization formats—maps, histograms, and statistical tables—to accelerate analysis.
   
• Instant, customizable reporting: the app generates tailored reports on the spot, including optional statistical summary tables and histogram visualizations
   

Intuitive user interface, with all features easily accessible
(49 point sampling pattern shown)

<sup>1. Sampling pattern
2. 2D width intensity map
3. I_2D/I_G width histogram
4. Selected point spectrum
5. Sample definition
6. Acquisition and analysis parameters
7. Statistical table</sup>

Instant, customizable reports can be generated