Dissolved Ozone Monitor OZ-96

Vue d'ensemble

Technologies are being developed that use ozone water in semiconductor cleaning processes and resist separation processes. This dissolved ozone concentration monitor is able to cover a broad measuring range from low concentrations to high concentrations.


  • Simultaneous display of measured values and parameter settings
  • Simple operation confirmation mechanism
  • 24 V DC power supply (CE-compatible)

Fabriqué par HORIBA Advanced Techno




Measurement target

Ozone concentration in ultra-pure water

Power supply

DC 24 V, 2 A


Panel-mounted: DIN 96 x 96, Indoor installation
Case: SPCC
Panel: ABS

External dimensions

96 (W) x 96 (H) x 145 (D), case depth: 135 mm


Approx. 650 g

Produits associés

In-line type Dissolved Ozone Monitor OZ-96i

Ideal for ozone fluid density control in semiconductor production processes