CS-1000 化學溶液監測系統

化學溶液監測系統

可對BEOL製程所使用多元素含量的化學溶液進行濃度管理。^*1.

無需任何預處理即可檢測化學溶液中濃度低至ppm級*2的成分。只需將整合在獨立櫃體中的一體化系統安裝在生產現場即可開始使用*3

*1「後端製程」的縮寫，指的是半導體前端製程的佈線形成製程。
*2 ppm = parts per million.對於液體成分，1 ppm 表示 1 公升液體中含有 1 毫克該成分。
*3 獲得SEMI S2認證。

製造商: HORIBA Advanced Techno Co., Ltd.

檢測ppm級低濃度組分
透過提高光譜儀的性能（擴大波長範圍和提高分辨率），並結合 pH 計和電導率計的訊號，可以檢測 ppm 等級的低濃度成分。

同時測量兩種不同的化學溶液
該裝置配備兩條獨立的樣品管路。透過完全隔離，它可以同時測量兩種不同的化學溶液。

每六個月只需進行 4 小時的維護
配備有自動校準功能的pH計。維護僅需更換pH計的燈泡、內部溶液瓶和校準溶液瓶。

Product name	Chemical Solution Monitoring System
Model	CS-1000
Measurement item	Chemical Concentration, Conductivity, pH
Measurement principle	Absorption spectroscopic method, 2-electrode method, Glass electrode
Target chemicals	Multi-component chemical solutions used in semiconductor manufacturing processes (Please contact us for details)
Dimension	700 (W) × 610 (D) × 1640 (H) mm (Excluding protrusions)
Weight	Approx. 200kg
Wetted materials	Cabinet (PFA, PTFE) Absorbance Monitor (PFA, PTFE, Quartz, Kalrez™) Conducvitity Meter (PFA, Carbon, Kalrez™) pH Meter - Drain use (PVC, PTFE, Glass, ETFE, PEEK, Olefinic resin, THV, PFA, Kalrez™, PharMed BPT) ※Karlez™ is trademarks of DuPont de Nemours, Inc.
Conforming standards	CE , KC , FCC Rules Part15 , UKCA , SEMI S2

Ambient temperature	20 to 30 degree C (Within ± 0.5 degree/1hour, sudden temperature change should be avoided)
Ambient humidity	40 to 70%RH (Should be no dew condensation)
Power source	AC 190～240V (Single-Phase）、50/60Hz
Power consumption	Approx. 355VA (Transient electric current at the time of the start is excluded)
Communication	Analog Output: Hardwired_4-20mA, Serial: RS-485_Modbus RTU, Parallel IO (refer to attachement) ※ Signal output is fixed at 1.5mA when measured values are not updated, such as monitor error.

Consumables	Replacement parts by customer or HORIBA service engineers. Halogen lamp (Rated life: approx. 1 year) Deteurium lamp (Rated life: approx. half year) Reagent： pH4, pH7, KCl 3.33moL AgCl Saturate (Raplacement term: approx. half year)

CS-1000