發射光譜和MWL測量的終端與腔室健康監測
Optical Emission Spectroscopy Etching End-point Monitor
Plasma Emission Controller
UV-VIS-NIR Spectrometer
Multispectra, Multifiber, Multichannel Imaging spectrometer with 8-16-32 Simultaneous UV-NIR Spectra
Most Compact Vacuum UV Back-Illuminated CCD Spectrometer (VUV-FUV)
Miniature Multi Communication UV-NIR Spectrometer
Miniature High Throughput Spectrometer
Mid-Focal Length Imaging Spectrometers
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