Quadrupole Mass Analyzer
Capacitance Manometer
Vapor Concentration Monitor
High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring
Plasma Emission Controller
Vapor Concentration Controller
High-Accuracy Infrared Thermometer [Built-in type]
高精度紅外線測溫儀【內建型】
高精度紅外線測溫儀【固定式】
發射光譜和MWL測量的終端與腔室健康監測
Optical Emission Spectroscopy Etching End-point Monitor
UV-VIS-NIR Spectrometer
Multispectra, Multifiber, Multichannel Imaging spectrometer with 8-16-32 Simultaneous UV-NIR Spectra
Most Compact Vacuum UV Back-Illuminated CCD Spectrometer (VUV-FUV)
Miniature Multi Communication UV-NIR Spectrometer
即時雷射測量監控系統
Mid-Focal Length Imaging Spectrometers
Miniature High Throughput Spectrometer
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