CS-900F

光纖型非接觸式化學濃度監測器

無接觸、穩定的半導體製程化學品濃度測量!
CS-900F 採用非接觸測量方式,只需將感應單元安裝到管道上即可實現。這種方式有助於降低化學品洩漏和污染的風險。

我們還擴大了對濕法加工化學品的支援範圍,進一步提升了作為 CS 系列旗艦機型的穩定性和多樣性。

 

Chemical Concentration

DC24VTransmission OutputContact OutputRS-232CHigh TemperatureNon-contact Multi Component

事業部: Semiconductor
產品分類: Wet Process Control
製造商: HORIBA Advanced Techno Co., Ltd.

小體積與穩定的測量性能

透過引入光纖電纜,我們將安裝在客戶設備內的電池單元體積與先前型號相比減少了約 60%*,從而實現了穩定測量並降低了對外部干擾的敏感性。

可測量大範圍濕製程的化學品

通過將波長範圍擴展到約前一代機型的三倍*,它支持更多種類的濕式處理化學品。高溫化學溶液(最高可達80°C)可以直接測量,無需預處理,有助於操作更安全。

透過非接觸式測量以實現安全性與流程優化

CS-900F 使用非接觸式方法,只需將感測單元安裝在管道上,即可降低化學品洩漏和污染的風險。它有助於操作更安全,並減少化學品的消耗。

* 與HORIBA先前型號的比較。實際結果可能因使用方式和條件而異。

 

Product name

Fiber-Optic Type Non-Contact Chemical Concentration Monitor

Model

CS-900F

Measurement principle

Absorption spectroscopic method

Calculation

Temperature compensation multivariate analysis

Measurement range・Repeatability
(Unit:mass%)

Model

Component

Measurable range

Repeatability

Analog output range

CS-900F-1-1-1P-1P25P5-AA

NH3

0.00 to 1.20

±0.05

0.00 to 10.00

H2O2

0.00 to 5.50

±0.10

0.00 to 10.00

H2O

93.3 to 100.0

±1.0

CS-900F-1-1-1P-P8P8-11

NH3

0.00 to 0.80

±0.03

0.00 to 1.00

H2O2

0.00 to 0.80

±0.03

0.00 to 1.00

H2O

98.4 to 100.0

±0.2

Conditions of measurement

1) Measurement interval : Approx. 5 sec
2) Moving average: 16 times

Tube

PFA tube 1 inch or 3/4 inch (Avoid the black part of the anti-static type PFA tube)
Note: The surface of the pipe must be free of scratches, dents, and cloudiness.

Sample condition

Sample temperature: 20 to 80 ℃
Atmospheric temperature, Sample temperature fluctuation: ±1 ℃ (period of time: 1 hour)
Sample pressure less than 0.2 MPa (G)
Sample pressure fluctuation: within 0.02 MPa
Note: Air bubble in sample solution effect on measurement so please flow sample to prevent from bubble remaining PFA tube.

Power source

24 V DC

Power consumption

Approx. 40 W (Transient electric current at the time of start is excluded)

Weight

Main unit: Approx. 5.8 kg
Cell unit: Approx. 1.4 kg

Dimension

Main unit: 217 (W) X 290 (D) X 173 (H) mm (Excluding projections)
Cell unit: 186 (W) X 142 (D) X 83 (H) mm (Excluding projections)

Slanting angle of installation

Main unit within ±1°

Expected lifespan of light source

5 years

Fiber-optic cable

Standard length: 5 m, Bend radius: R150 mm

留言諮詢

如您有任何疑問,请在此留下詳細需求或問題,我們將竭誠您服務。

* 這些欄位為必填項目。

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