PLIMA-LED

Micro Photoluminescence Imaging System

PLIMA-LED is a next-generation photoluminescence solution that integrates PL, AOI, and spectral analysis into a single platform, enabling precise optical inspection, yield analysis, and seamless integration with manufacturing execution systems.

事業部: Semiconductor
產品分類: Metrology

Integrated PL, AOI, and Spectrum Analysis

  • PL Image
    • Detection Items:
      - Intensity: High/Low/No Signal
      - Chip Luminance: Average/Total
      - Standard Deviation/Coefficient of Variation (CV)
    • Chip Size ≥ 10 μm, Pitch ≥ 20 μm, Gap ≥ 3.5 μm
       
  • AOI
    • Detects surface defects, cracks, pattern misalignment, and positioning errors
      Minimum detectable chip size: 1.5 μm
      Achieves composite judgment based on AOI and PL information
       
  • Spectrum Analysis
    • Key spectrum parameters:
      - Wp (Peak Wavelength)
      - FWHM (Full width at half maximum)
      - II (Integrated intensity), Ip (Peak intensity)
    • Pitch Resolution
      - 0.5 mm (4-inch wafer), 1.0 mm (6-inch wafer), 2.0 mm (8-inch wafer)
       

 

General Specification

GeneralScan methodSpiral scan with 1800 RPM rotation and linear motion
Wafer4＂, 6＂
StageXY-axis Linear stage, Z axis stage
R stage with 1800RPM (Max)
Measurement Objective Lens5X, 10X, 20X, 50X
Laser excitation without objective lens (Option)
Image CameraResolution : 2048 x 2048 (4M pixel)
Pixel size : 5.5 um x 5.5 um
Optical Fiber400 um bundle core
PMT Port 1 (PMT 1) : PL Inspection with bandpass filter
Port 2 (PMT 2) : Reflection (Scattering)
SpectrometerGroove Density : 300 lines/ mm
Spectral range (nm) : 210 – 2100
Pixel (ea) : 2048 x 64
Dispersion : 0.44 nm / pixel
Excitation Source50 mW 375 nm Laser (for Blue, Green LED)
50 mW 532 nm Laser (for Red LED)
Measurement speed  4inch6inch
PMT Mapping
(2 channel at same time, 5um step)		8pcs / 1H6pcs / 1H
PMT Mapping & Spectrum mapping
(Optional measurement)		7 pcs / 1H
(PMT : 5um / Spectrum : 2mm )		7 pcs / 1H
(PMT : 5um / Spectrum : 4mm )
Micro Spectrometer mapping3,600 points / hour Step : Min. 2um
Dimension (mm) 2000 (w) x 1400 (d) x 2000 (h)

Utility

Operating Environment PlaceClean Room (class ~ 10000)
Temperature15 ~ 35° C
Humidity<85% RH with no condensation
UtilityDimensions1500 mm x 2000 mm x 2300 mm, incl. HEPA filter
Weight1760 Kg
Input Voltage220V±10% 50/60Hz single phase
Full load current47A
Vacuum140L/min, -80KPa
Pipe size : Outer diameter 6mm
Vacuum2120L/min, -40KPa
Pipe size : Outer diameter 6mm
Air90L/min, 0.5MPa
Pipe size : Outer diameter 6mm

 

尺寸 62.19 MB
〈Catalog〉Metrology Solutions For Compound Semiconductor Wafer

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