VC Series

Direct Liquid Injection System

The VC Series is able to rapidly vaporize pure water or other liquid sources without carrier gas, which enables you to construct a more compact vaporization system.

HORIBA can provide you with a custom-made vaporization system consisting of this VC Series and all the other components you need:

A liquid mass flow meter for flow rate measurement,
A high temperature mass flow controller for measurement of vapor flow rate,
Valves, filters, heaters, etc.

事業部: Semiconductor

產品分類: Fluid Control

製造商: HORIBA STEC, Co., Ltd.

Compact size
Can be installed in a variety of positions
Best-selling TEOS vaporization system models
Combines SEF or LF, and digital control is possible
No need for a special bubbling tank or vaporization tank
Line-up of DeviceNetTM model
RoHS Compliance.

Model	VC-1420
Flow rate generated^*1 (During TEOS generation)	Max. 5.0 CCM conversion (liquid phase conversion)
Liquids supported	TEOS, P(OCH3)3, C6F6
Temperature rise	Max. 150°C
Pressure generated^*1	Reduced pressure
External leak integrity	1.0x10-8Pa·m3/s
Internal Leak Integrity	1.0x10-6Pa·m3/s
Wetted mateliar	316L Stainless Steel ( polished surface )
Internal heater volume	AC 100V to 120V 70W(35Wx2)
Temperature sensor used	Thermocouple K type (CA)
Pressure Resistance	1.0MPa（G）
Standard Fitting	Liquid inlet: 1/8 inch VCR type male Gas outlet: 1/4 inch VCR type female
*1 Varies depending on the type of liquid.
*CCM is a symbol indicating gas flow rate (mL/min at 25°C, 101.3 kPa).