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流體控制

流體控制

半導體製造製程測量與控制技術

展開圖

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Measurement and control technology in semiconductor manufacturing process chambers

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Measurement and control technology in semiconductor manufacturing process chambers

產品目錄

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NEW!! High Speed & Precision Pressure Insensitive Mass Flow Module

D700MG

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NEW!! Wide Range Pressure Insensitive Mass Flow Module

D700WR

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Differential Pressure Mass Flow Controller

CRITERION D500

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Differential Pressure Ultra-thin Mass Flow Controller

DZ-100

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High Performance Thermal Mass Flow Module

SEC-Z700S Series

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Thermal Mass Flow Controller

SEC-Z500X Series

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Thermal Flow Splitter

FS-3000

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Auto Pressure Regulator

GR-511F

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High Performance Liquid Vaporization System

XF-100\MV-2000 Series

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