材料分析

HORIBA's instruments can detect and analyse particles on photomask. For organic and polymer materials, RAMAN is used to analyze the detected foreign particles on a mask such as nylon, hair and cosmetic. For metal materials,XGT-9000 is used to analyze the detected foregin particles on a mask such as Ni, Al and Cr.

Ellipsometry is used to monitor thickness and optical constant (Réflective index (n) and Extinction Coefficient (k)) of pellicle on photomask.

薄膜厚度分析

评估下一代薄膜的厚度均匀性。

粒子目标识别

有助于分析十字线上的异物成分来研究问题。

相关产品

详情 UVISEL Plus 椭偏

研究级经典型椭偏仪

详情 XploRA Nano

纳米拉曼光谱仪

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