This method vaporizes liquid in a liquid material tank using a carrier gas. It has been used for many years as a method to vaporize (gasify) liquids such as pure water and alcohol in production facilities and R&D equipment in various industries. In recent years, it has also been used in LED production equipment and is recognized as a method for vaporizing liquids.
HORIBA has produced test gas generation systems for research and evaluation of gas sensors and catalysts, as well as equipment equipped with the bubbling method for solar cell production facilities, and has accumulated know-how in the logic for stable generation over long periods of time and variable generation concentration. We have also commercialized in-line gas concentration monitors for use in LED production equipment, and provide comprehensive support for liquid vaporization equipment employing the bubbling method.