Semiconductor manufacturing equipment is increasingly demanding more compact liquid material vaporization systems, and many direct vaporization systems have been adopted to meet these needs. In-house mass flow controllers/meters are used in the flow control section for carrier gas and liquid materials. HORIBA's unique system lineup is tailored to meet customers' requirements.
Liquid material and carrier gas flow rates are controlled by a digitally controlled mass flow controller/meter and introduced into a dedicated vaporization section. In the vaporizer, the liquid material and carrier gas are efficiently given heat for continuous vaporization. The simple structure enables the construction of a liquid material vaporization system that is both compact and lightweight.