颗粒检测

半导体制程综合颗粒检测

For Semiconductor manufacturing processes, where the most advanced micro-fabrication techniques are used, quality management is a critical issue that directly impacts business.

It is important to constantly inspect for the presence of particle contamination. By making use of advanced analysis technologies, HORIBA provides cost effective leading-edge particle detection solution to semiconductor manufactures.

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光罩/掩膜颗粒去除设备

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