In the cleaning process used in the production of semiconductor devices and flat panel displays, it is imperative to use water with the utmost purity for the elimination of any remaining impurities in the product. Various water quality meters are required to manage the process of refining industrial water into pure water, and then pure water into ultrapure water. Furthermore, checking the purity of water is essential for use in the actual production process at the point of use. To check the purity at this extreme level, a water quality meter capable of stable, highly accurate measurements is required.
HORIBA offers water quality meters required for ultrapure water management, such as silica concentration monitoring at the ppb level and stable measurement of electrical resistivity in the range of 18.20 MΩ cm or higher.
