D700T

Best Performance Pressure Insensitive Mass Flow Module

D700T 是性能最佳的壓力式質量流量模組，專為關鍵半導體製造工藝而設計。 D700T 採用 HORIBA CRITERION 基於壓力的流量測量和控制技術，提供業界領先的可重複和準確的效能。此外，D700T的獨特之處在於採用了專利的先進流量控制演算法和雙閥結構，使客戶的氣體輸送系統能夠解決多重挑戰。

事業部: Semiconductor

產品分類: Fluid Control

製造商: HORIBA STEC, Co., Ltd.

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概要
配置

≤ 100 msec fast settling time across-the-board (Set to Set, Step up and Step down)
Inlet and outlet pressure insensitive performance
Advanced failure detection to diagnose pressure sensor shift, valve seat leak and flow accuracy change
Within 0.15 %S.P. repeatability
Best accuracy specification is within 0.45 %S.P.* (Standard: 0.8 %S.P.)
Wider Operating Temperature Range (15-60 °C)

*Note: D700T is single gas configuration. Ask Horiba for specification.

Go to External Drawing

＊1 Flow rate accuracy can be guaranteed down to 0.1 SCCM N2 equivalent.
＊2 This is guaranteed value under 25 ℃ and ≤ 1 × 10-3 Pa (A).
＊3 Setting time is MFC output signal and N2 gas at 25 ℃. Definition of setting time is 2 %S.P. or 0.05 %F.S. of the change in setting, whichever is larger. However, if the change in setting is less than 0.5 %F.S., 50 % of the change in setting.
＊4 Pressure perturbation has to be smaller than 20 % pressure change per second and ±70 kPa/sec. (±10 PSI/sec.)
＊5 Zero adjustment is required to eliminate orientation influence after installation.
＊6 EtherCAT® is a registered trademark and patented technology, licensed by Beckhoff Automation GmbH in Germany.