CS-1000

Chemical Solution Monitoring System

Enables the concentration management of multi-component chemical solutions containing trace elements used in the BEOL process*1.

Low concentration components at ppm level*2 in chemical solutions can be detected without any pretreatment. Simply install the all-in-one system, consolidated in an independent cabinet, at the manufacturing site to begin use*3.

*1 Abbreviation for "back end of line," referring to the wiring formation process in the semiconductor front-end process.
*2 ppm = parts per million. For liquid components, 1 ppm means that 1 mg of a component is present in 1 liter of liquid..
*3 SEMI S2 certified.

 

Chemical ConcentrationpHCOND

Low ConcentrationAutomatic CleaningAutomatic CalibrationContact OutputRS-485

事业部: 半导体
产品分类: 湿法过程控制
制造商: HORIBA Advanced Techno Co., Ltd.

Detection of low concentration components at PPM level

By improving the performance of the spectrometer (expanded wavelength range and enhanced resolution) and combining signals from pH meters and conductivity meters, it is now possible to detect low concentration components at ppm level.

Simultaneous measurement of two different chemical solutions

The device is equipped with two separate sample flow lines. By completely isolating the flow paths, it enables simultaneous measurement of two different chemical solutions.

4 hours of maintenance every six months

Equipped with a pH meter featuring an automatic calibration function. Maintenance involves only replacing the lamp and the internal solution and calibration solution bottles of the pH meter.

【Basic Specification】

Product name Chemical Solution Monitoring System
Model CS-1000
Measurement item Chemical Concentration, Conductivity, pH
Measurement principle Absorption spectroscopic method, 2-electrode method, Glass electrode
Target chemicals Multi-component chemical solutions used in semiconductor manufacturing processes (Please contact us for details)
Dimension 700 (W) × 610 (D) × 1640 (H) mm (Excluding protrusions)
Weight Approx. 200kg
Wetted materials Cabinet (PFA, PTFE)
Absorbance Monitor (PFA, PTFE, Quartz, Kalrez™)
Conducvitity Meter (PFA, Carbon, Kalrez™)
pH Meter - Drain use (PVC, PTFE, Glass, ETFE, PEEK, Olefinic resin, THV, PFA, Kalrez™, PharMed BPT)
※Karlez™ is trademarks of DuPont de Nemours, Inc.
Conforming standards CE , KC , FCC Rules Part15 , UKCA , SEMI S2




【Condition of installation】

Ambient temperature 20 to 30 degree C (Within ± 0.5 degree/1hour, sudden temperature change should be avoided)
Ambient humidity 40 to 70%RH (Should be no dew condensation)
Power source AC 190～240V (Single-Phase）、50/60Hz
Power consumption Approx. 355VA (Transient electric current at the time of the start is excluded)
Communication Analog Output: Hardwired_4-20mA,  Serial: RS-485_Modbus RTU,  Parallel IO (refer to attachement)
※ Signal output is fixed at 1.5mA when measured values are not updated, such as monitor error.




【Maintenance】

Consumables Replacement parts by customer or HORIBA service engineers.
Halogen lamp (Rated life: approx. 1 year)
Deteurium lamp (Rated life: approx. half year)
Reagent： pH4, pH7, KCl 3.33moL AgCl Saturate (Raplacement term: approx. half year)

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