CS-600F

Fiber Optic Type Chemical Concentration Monitor CS-600F

光纤型化学药液浓度计

CS-600F 提供适合生产的更高级功能,如在各种应用中对高温化学药液进行在线测量的能力,减少停机时间的稳定运行,以及提高空间生产率的紧凑尺寸,以满足先进半导体湿法制程所需的准确化学药液浓度管理。

事业部: 半导体
产品分类: 湿法过程控制
制造商: HORIBA Advanced Techno Co., Ltd.
  • 尺寸更小,布局更灵活
    CS-600F 浓度计尺寸紧凑,与成熟型号(CS-100F1 系列)相比,高度降低 36%,体积减少 40%,样品单元光纤电缆所需的空间减少 46%。
    光源单元和浓度计主机可以远程单独安装,支持根据化学药液单元和清洗设备的位置灵活安装。
  • 高温化学溶液(20 至 80℃)的高稳定性在线测量
    新的光学系统和改进的处理算法支持在线测量高温化学药液,这是先进湿法制程的关键一步。这消除了冷却化学样品的需要。HORIBA 的 CS-600F 稳定性高,实现了更有效和准确的化学药液管理。
  • 背景校正频率显著降低
    与成熟型号(CS-100F1系列)相比,定期校正频率显著降低,这反过来又显著减少了机台停机时间,有助于提高产量。
  • 单台浓度计可测量多达六种化学药液(药液种类或浓度范围)
    单台浓度计可测量多达六种化学药液(药液种类或浓度范围)。可自由指定药液类型和浓度范围,CS-600F 保证满足各种检测要求。
  • 可输出多达六种组分的测量值(串行输出)
    成熟型号(CS-100F1 系列)可输出四种组分的测量值(串行输出)。CS-600F新型号能以串行输出方式输出多达六种组分的测量值。CS-600F型号模拟输出四种组分,而CS-100F1型号为两种。
ModelCS-600F
Measurement
principle
Absorption spectroscopic method
Calculation
principle
Temperature compensation type multivariate analysis
Measurement targetNH3/H2O2/H2O (reperesentative specification)
* Please contact HORIBA regarding other chemicals.
Measurement rangeNH3:0.00~1.20mass%、H2O2:0.00~5.50mass%、
H2O:93.3~100.0mass%
RepeatabilityNH3:±0.05mass%、H2O2:±10mass%、H2O:±1.0mass%
Chemical temperature: Within ±1℃/1 hour
Sample solution
temperature
20〜80℃
Measurement cycleApprox. 3 seconds
LCD
display
(1) Measured value (%)
(2) Concentration alarm (HH/H/L/LL)
(3) Error code (EXXX)
(4) Chemical temperature (°C)
(5) Serial/parallel communication status (P/S)
(6) The times of background correction failure (CXXX)
Key input(1) Concentration alarm setting (HH/H/L/LL)
(2) Concentration value shift
(3) Background correction
(4) Hot water correction
(5) Temperature dependent concentration shift
Parallel
input
Input voltage of 12 V to 30 V DC by insulating with photo coupler
(1) Parallel concentration alarm output (On/Off)
(2) Switching chemical solution for measurement
(including background correction)
(3) Hot water correction
Parallel
output
Transistor output (NPN open collector) by insulating with photo coupler
Maximum current when powered ON: 5 mA DC (no internal protective resistance)
Maximum voltage when powered OFF: 30 V DC
(1) Concentration alarm (ON at HH/H/L/LL alarm)
(2) Monitor error (OFF at error)
(3) Measuring (ON at measurement)
(4) Chemical solution type for measurement
(5) Echo to hot water correction input
(6) Warning (ON at occurred)
(7) Background correction status 8) Hot water correction status
Serial inputRS-232C
(1) Request for readout of measurement data
(2) Select chemical solution type to be measured
(3) Hot water correction
Serial
output

RS-232C
(1) Measured data No.
(2) Chemical solution type
(3) Concentration value
(4) Error code
(5) Chemical temperature

Analog
output
4 mA to 20 mA
In case of monitor error occurs, measurement is stopped or
invalid chemical range is selected, the signal output is fixed at 1.5 mA. The load resistor must be 500 Ω maximum.
Chemical solution
temperature input
Terminal block inlet (terminal screw M3)
Platinum resistance temperature sensor: Pt100
(Three-conductor type, Class A) *Temperature sensor is not included.
Air
(for operation and purge)
Connection port: 4 mm O.D. quick joint,
Pressure: 0.2 MPa ±0.02 Mpa
Power source100~230V AC(Single-Phase)、50/60Hz
Power consumptionApprox. 85 VA
(transient electric current at the time of the start is excluded)
Weight(Monitor) Approx. 3.6 kg
(Lamp unit) Approx. 2.8 kg
(Sample cell) Approx. 1.2 kg
Ambient temperature(Monitor, Lamp unit) 20°C to 30°C
(Sample cell, Optical fiber) 20°C to 35°C
(Sudden temperature change should be avoided, within ±1°C/1 hour)
Ambient humidity(Monitor, Lamp unit, Sample cell) 40% to 70%
(Should be no dew condensation)
Slanting angle at installation(Monitor, Lamp unit) within ±1°
Optical fiberLength: 5 m, minimum bend radius: R 150 mm

Schematics


 

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