PD Xpadion

Reticle / Mask Particle Detection System

Next-generation inspection platform to meet future needs

PD-Xpadion is the latest generation of the HORIBA Particle Inspection product line. Based on an innovative modular platform design, PD Xpadion is the right tool to meet current and future needs of Mask & Pellicle inspection in the lithography and mask production processes. Fab automation, combined with a suite of HORIBA’s core technology, allow users to expand the PD Xpadion system to include not only particle inspection and detection, but also particle characterization by Raman analysis, pellicle film thickness and uniformity, and pellicle health monitoring tools.

事业部: 半导体
产品分类: 计量学
制造商: HORIBA, Ltd.

请选择一个本产品可售卖的国家和区域:
中国,Germany,Ireland,Israel,Italy,Korea (South),Malaysia,Singapore,中国台湾,United Kingdom,United States
浏览完整列表 点击此处.

  • Adjustable detection sensitivity by utilizing a combination of optical systems
  • OHT, EFEM, multi-port, multi-slot adaptation
  • Ability to reanalyse inspection data for faster inspection recipe optimization
  • Integration options with other HORIBA sensor products like Raman spectroscopy and Ellipsometry
  • False detection reduction function
  • Innovative software with improved usability
Model PD Xpadion
Dimensions(W) x (D) x (H)1,000 x 1,850 x 1,600 mm
WeightApprox. 950kg
Inspection Particle SizePattern0.5 μm / 0.35 μm (0.1 μm : Blank Mask)*¹
Glass5.0 μm (0.5 μm - : High Sensitivity Option)*¹
Pellicle10.0 μm (0.5 μm - : High Sensitivity Option)*¹
Light Source633 nm He-Ne laser or 488 nm Solid-state laser
Reticle Size5 inch - 9 inch
Case openersSMIF POD, Compatible with various cases
ThroughputApprox. 12 min (From inspection start to test result display for 2 surface (6 inch) inspection)
Panel Surface TreatmentStainless Steel
Installation EnvironmentCleanlinessClass6 ISO standards or better 
Temperature23 +/- 1°C
UtilitiesPowerAC200-240 V, 2 kVA 50/60Hz, Single Phase
Vacuum SourcePressure -80 kPA or less
Compressed Air0.6 MPa - 0.7 MPa

New Function / Option

Reticle Edge HandlingYes
Auto Capture / Auto SizingYes
Data Browser FunctionYes
False Detection Reduction FunctionYes

*PSL equivalent , HORIBA recommends customer sample test for inspection sensitivity validation.

 

留言咨询

如您有任何疑问,请在此留下详细需求信息,我们将竭诚为您服务。 * 这些字段为必填项。

Related products

PR-PD3 Pro
More PR-PD3 Pro

Reticle / Mask Inspection System

RP-1
More RP-1

光罩/掩膜颗粒去除设备

APDA-372
More APDA-372

空气颗粒物监测仪

nanoPartica SZ-100V2
More nanoPartica SZ-100V2

纳米粒度及Zeta电位分析仪

Partica LA-960V2
More Partica LA-960V2

激光粒度分析仪

Partica mini LA-350
More Partica mini LA-350

激光粒度分析仪

PR-PD3 Pro
More PR-PD3 Pro

Reticle / Mask Inspection System

Corporate