Size:
3.65
MB
PD10 样本
| Model | PD10 | |
| Dimensions | (W) x (D) x (H) | 1,000 x 1,850 x 1,600 mm |
| Weight | Approx. 950kg | |
| Inspection Particle Size | Pattern | 0.5 μm / 0.35 μm (0.1 μm : Blank Mask)*¹ |
| Glass | 5.0 μm (0.5 μm - : High Sensitivity Option)*¹ | |
| Pellicle | 10.0 μm (0.5 μm - : High Sensitivity Option)*¹ | |
| Light Source | 633 nm He-Ne laser or 488 nm Solid-state laser | |
| Reticle Size | 5 inch - 9 inch | |
| Case openers | SMIF POD, Compatible with various cases | |
| Throughput | Approx. 12 min (From inspection start to test result display for 2 surface (6 inch) inspection) | |
| Panel Surface Treatment | Stainless Steel | |
| Installation Environment | Cleanliness | Class6 ISO standards or better |
| Temperature | 23 +/- 1°C | |
| Utilities | Power | AC200-240 V, 2 kVA 50/60Hz, Single Phase |
| Vacuum Source | Pressure -80 kPA or less | |
| Compressed Air | 0.6 MPa - 0.7 MPa | |
New Function / Option | Reticle Edge Handling | Yes |
| Auto Capture / Auto Sizing | Yes | |
| Data Browser Function | Yes | |
| False Detection Reduction Function | Yes | |
*PSL equivalent , HORIBA recommends customer sample test for inspection sensitivity validation.
