Semiconductor Instruments

Author: Yoshiaki Okada – For approximately the past twenty years, antiair-pollution activities have made on the use of fluorescent X-ray analyzers that enable the simple measurement of sulfur concentration in fuel oil and heavy oil. In recent years, as environmental problems have become increasingly acute, the technology of sulfur analyzers has become progressively sophisticated. Horiba's Model SLFA-1800, an easy-to-use sulfur analyzer introduced in August of 1991, offered numerous new features, including correction for temperature and atmospheric pressure, automatic gain control, and self-diagnosis functions. As a result, the SLFA-1800 is much easier to use and simpler to maintain ; in addition it is much more resistant to changes in temperature and atmospheric pressure. This has improved the long-run reliability and eliminated warm-up time. (Same content in Japanese is in Readout No.5-Japnese edition-.)

Author: Atsushi Horiba; President and CEO

Author: Katsuya Tsuji; Ramdane Benferhat; JOBIN YVON S.A.S.; Kiyoaki Hara; STEC Inc.; Seiichi Hirakawa; HORIBA JOBIN YVON CO., Ltd. – Competitiveness in strategic industries–such as automobiles and telecommunications depends on the semiconductor, flat panel display equipment, and materials industries. It is not an exaggeration to say that these industries are supported by their measuring equipment’s. HORIBA Semiconductor Measurement Group, HORIBA, Ltd., STEC Inc., JOBIN YVON S.A.S., and HORIBA JOBIN YVON Co. Ltd. are developing applications and products that meet the market’s need. Recently, four leaders of these companies discussed HORIBA’s future role and their technical potential. Each of these semiconductor-related firms focus on the four application fields; Wet Process Monitoring, Thin Film Control & Inspection, Source Supply, and EHS(Environment/Health/Safety). Through far-ranging debate they will introduce some of the major products that the HORIBA Group has actively developed, and reaffirm the importance of working together to develop solutions based on the needs of the market.

Author: Yoshinori Nagai, Masaaki Magari – The UT-300 Full-automatic Ultra-thin Film Measuring System has been developed to measure the optical properties of thin films in the semiconductor production process. It allows for accurately measuring refractive index and attenuation coefficient as well as thickness of thin films. The UT-300 should meet the needs arising from the sophisticated and diversified semiconductor production lines. We introduce the UT-300 and the related software that enables various features of this system. (Same content in Japanese is in Readout No.21-Japanese edition-.)

Author: Ramdane Benferhat; JOBIN YVON S.A.S. – Recent advances in thin film technology, especially in semiconductor one, are providing new opportunities and challenges for the development and application of spectroscopic ellipsometry in thin film metrology. Nowadays precise determination of film thicknesses, optical properties and surface morphology are extremely important to produce high quality devices. JY’s spectroscopic ellipsometer is based on the use of a PEM modulator, which allows fast and accurate measurements. The optical system combines with a powerful numerical data acquisition system, that enables real time multiple wavelength computing. We compare JY’s technology with other systems, such as rotating polarizer type of ellipsometer. As detailed in another paper from this serie, PEM ellipsometer proves to be the most sensitive and precise technique for ultra thin films measurements.

Author: Seiichi Hirakawa; HORIBA JOBIN YVON Co., Ltd.; Nataliya Nabatova-Gabain; HORIBA JOBIN YVON Co., Ltd.; Yoko Wasai; HORIBA JOBIN YVON Co., Ltd.; Hiroshi Iida; HORIBA JOBIN YVON Co., Ltd. – The UT-300 spectroscopic ellipsometer is a fully-automated measurement system developed specifically for use on semiconductor production lines. The spectroscopic ellipsometer serves as the main component of the system for recipe verification. Although the UT-300 is intended for analysis of the most advanced types of films using state-of-the-art techniques, the authors focus on the basics in this article, describing the spectrum analysis steps required to perform multilayer analysis and providing guidelines on the effective use of the instrument. (Same content in Japanese is in Readout No.21-Japanese edition-.)

Author: Pascal Amary; JOBIN YVON S.A.S.; Eric Bluem; JOBIN YVON S.A.S.; Christian Louis; JOBIN YVON S.A.S.; Jean-Philippe Vassilakis; JOBIN YVON S.A.S. – In the spirit of the Global HORIBA Group philosophy and strategy, the Thin Film Division of JOBIN YVON S.A.S., has developed in collaboration with a key semiconductor manufacturer a new generation of Multi sensor Platform for Advanced Process Control of complex processes. Based on innovative proprietary technology, and long relationship with end-users, the competitive edge of our products, originality of the architecture, smart sensor technology, analytical methodology, and unique signal processing will allows to satisfy the needs of in-situ process control.

Author: Takaaki Yada – We have developed and commercialized the CS-100 Series Chemical Solution Monitor for Semiconductor Wet Cleaning Process, which features high responsiveness and compact design. This series includes a model that uses developed new design of monochromator to monitor in real time the concentration of each component in SC-1 (ammonia/hydrogen peroxide solution), SC-2 (hydrochloric acid/hydrogen peroxide solution), SPM (sulfuric acid/hydrogen peroxide solution), and BHF (fluorine / ammonium fluoride solution). This series has been upgraded based on technology seeds that we could get over long years. This paper introduces the features of the new monochromator and the performance of the CS-100.

Author: Yoshihito Yuhara – The PLCA-800 series inline particle sensors for chemical solutions feature a compact design which permits inline measurement at up to 10 locations. The sensor, signal processing unit, and control unit are each contained in a separate module. An optional sampling unit provides deaerating and cooling to assure stable measurement of chemical solutions to meet a variety of practical needs. This article discusses the development of the product, its features and uses, and recommends techniques to achieve superior performance. (Same content in Japanese is in Readout No.21-Japanese edition-.)

Author: Katsumi Nishimura; Makoto Yoshida – There have been yearly increasing needs for measurement of gases used in the semiconductor and liquid crystal production processes. The Fourier transform infrared spectrometer (FTIR) as a tool for this measurement has become known widely. In order to meet the on-site needs for using the FTIR, HORIBA has recently developed a compact FTIR gas analyzer, FG-100 series. This paper introduces this product together with its measurement applications.

Author: Miyoshi Kimura; STEC Inc. – In the semiconductor industry, dealing with the large size wafer (Φ300mm) and shortening the process time have become strong requirements. In the cause of these requirements, we have developed the mount type small size MFC. This new MFC is 1/3 to 1/2 of the former model in size and weight. It has achieved standard dimensions and square bottom shape. Recent gas supplying panel weighs more than 50kg and it is hard to handle these gas panel alone. Mounting new MFC on a gas panel reduces the weight of a gas panel more than 10%. And because of its size and weight, applying this type MFC to other instruments, such as “helium chucking”, is increasing. On this paper, hoping an extent of the market, we introduce the feature of this MFC.

Author: Tetsuo Shimizu; STEC Inc. – Semiconductor manufacturing technologies are diverse and fast-changing, and none more so than thin film formation technology. The MOCVD is one of the most feasible thin film formation technique for ferroelectrics thin film for FRAM, capacitor film, insulating films and other high-functional thin film. Currently various substances are proposed as source materials for thin film. As these materials become more diverse, the technology in which the liquid material efficiently and stably vaporizes becomes very important. This paper reviews the various liquid material vaporization and supply methods, and presents the vaporization test results for some material using the direct injection method. And automatic tetra etoxy silan delivery system that developed by STEC Inc. is introduced.

Author: Toshihiro Kashima; STEC Inc.; Naoki Iwasaki; STEC Inc. – STEC Inc. HORIBA group, has developed the SEC-Z10D Series of DeviceNetTM Controlled Mass Flow Controllers. On semi-conductor device manufacturing lines, there is an urgent need to introduce new equipment and to make devices open and shareable in order to increase productivity. The SEC-Z10D Series design is based on DeviceNetTM, an open field network communications system being promoted by ODVA. In this article, we provide an introduction to the operation principle and features of the SEC-Z10D Series, and discuss the compatibility of the SEC-Z10D Series with DeviceNetTM. (Same content in Japanese is in Readout No.25-Japanese edition-.)