VG-200S

Capacitance Manometer

Absolute pressure measurement is crucial for most of vacuum processes in various industries including Semiconductor, FPD, HDD, PV and Coating. A capacitance manometer determines the total pressure from the deformation of the diaphragm that occurs when a pressure difference is applied to both side of the diaphragm. The strong points of the capacitance manometer over other methods are:

•Higher precision

•Less gas dependence in pressure output

•Relatively resistant to corrosive gases

事业部: 半导体
产品分类: 干法制程控制
制造商: HORIBA STEC, Co., Ltd.
  • Compact self heating design
  • Original signal processing method for accurate measurement
  • SUS316L diaphragm
  • Selectable from temperature-controlled (55, 100°C) or non-heating type
  • ONE PUSH ReZero
  • Power requirements +/-15VDC or 24VDC
  • CE & RoHS compliant
ModelVG-211SVG-221S
F.S. measurement range133.32 Pa (A)1.3332kPa (A), 13.332kPa (A), 133.32kPa (A)133.32Pa (A)1.3332kPa (A), 13.332kPa (A), 133.32kPa (A)
Sensor temperature *1Amb. (25°C)55℃ / 100°C
Accuracy *20.5% R.S.0.25% R.S.0.5% R.S.0.25% R.S.
Resolution0.03% F.S.0.01% F.S.0.03% F.S.0.01% F.S.
Zero temperature coefficient0.01% F.S./°C0.005% F.S./°C0.005% F.S. /°C0.0025% F.S. /°C
Span temperature coefficient0.05% R.S./°C0.03% R.S./°C0.03% R.S. /°C0.02% R.S. /°C
Response time< 60msec
Operating temperatue *310-50°C
Wetted materialsSUS316L
Pressurization limit300kPA (A)350kPa (A)300kPa (A)350kPa (A)
Output signal0-10VDC Load resistance: 10kΩ or more
I/O connectorD-Sub 15pin
Power supply voltage+15VDC±5%、0.1A max. -15VDC±5%、0.1A max+15VDC±5%, 0.6Amax. -15VDC±5%, 0.6Amax.
24VDC±5%, 2.4W max.24VDC±5%, 22W max.
warm-up time15 minutes60 minutes (55°C temp. control type)
120 minutes (100°C temp. control type)
Open collector outputRated voltage: 30V Rated current: 50mA
Re-Zero input *4Now-voltage contact input Contact open voltage: 13V Maximum contact current: 1.3mA
Standard fitting *5KF16, 1/2 inch VCR Female, ICF34, 1/4 inch VCR Female

*1 The sensor temperatureis indicated on the nameplate. Please specify the sensor temperature when ordering.
*2 Linearity, hysteresis, and repeatability are included. (at the ambient temperature of 25°C)
*3 Under the specified environmental conditions, when there are heat sources around the product or when some products are placed in close formation, the ambient temperature may exceed the specified ambient temperature.
*4 The adjustable range of the zero point is ± 5%.
*5 Please specify the fitting when ordering.

 

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