HE-960LF / FS-09F-1/2

HE-960LF / FS-09F-1/2

平面碳传感器电导率计

研磨液浓度控制的理想选择

有效保持恒定的研磨液稀释度。保持适当的电导率值有助于保持晶圆抛光制程中的工艺稳定性。即使是高粘度样品液体(如 CMP 研磨液)也可以正常测量,因为其使用的传感器结构降低了样品液体附着在电极上的风险。同时,传感器由具有良好耐化学性的接液材料制成,符合半导体制程的清洁度要求。此外,它还可以用于半导体制程开发阶段的引入和特殊化学药液的电导率控制。

事业部: 半导体
产品分类: 湿法过程控制
制造商: HORIBA Advanced Techno Co., Ltd.

高精度/高稳定性

  • 测量范围:0 至 2,000 μS/cm, 0 至 10,000 μS/cm
  • 重复性:± 0.5% F.S.,± 1.0% F.S.

无金属污染

由于电极材料采用特殊碳制成,因此无需担心金属洗脱污染问题。

配备浓度换算功能

通过输入化学药液浓度和电导率之间的关系以及温度特性,可实现两种不同类型的浓度换算。
特别适用于低浓度化学品的稀释控制。

节省空间

通过缩小传统电导率传感器的尺寸,提高了安装布局的自由度。

 

安装式例

■Specification conveter

Product nameConductivity meter
ModelHE-960LF
Measurement methodElectrode type(2-electrode method)
Temperature
specifications sensor
Platinum resistance 1000Ω/℃
Measurement
range
Cell constant0.1/cm1.0/cm
Conductivity0.00 to 20.00μS/cm0.0 to 200.0μS/cm
0.0 to 200.0μS/cm0 to 2000μS/cm
0 to 1000μS/cm0 to 10000μS/cm
*Measuring range of raw conductivity Switched with setting change
Temperature0 to 100℃ Actual temperature measuring range depend on the performance of the sensor connected.
Concentration
conversion
Option 1,20 to 10.000% Conversion formula is defined by user
(temperature compensation and concentration conversion)
RepeatabilityCell constant0.1/cm1.0/cm 
Conductivity0.00 to 20.00μS/cm range0.0 to 200.0μS/cm rangeWithin ±0.5% full scale
0.0 to 200.0μS/cm range0 to 2000μS/cm range
0 to 1000μS/cm range0 to 10000μS/cm rangeWithin ±1.0% full scale
Temperature±0.5℃
ConditionEquivalent input
LinearityCell constant0.1/cm1.0/cm 
Conductivity0.00 to 20.00μS/cm range0.0 to 200.0μS/cm rangeWithin ±0.5% full scale
0.0 to 200.0μS/cm range0 to 2000μS/cm range
0 to 1000μS/cm range0 to 10000μS/cm rangeWithin ±1.0% full scale
Temperature±0.5℃
ConditionEquivalent input
Transmission outputNumber of output:4
DC4 to 20mA / 0 to 20mA input/output isolated type
Maximum load resistance : 900Ω
Transmission output range : Free setting within measuring range
(Negative terminals of each transmission output channel are connected inside and thus
have the same electrical potential.)
Contact outputNumber of relay:5
ALARM contact R1,R2,R3 and R4
Contact type relay : Relay contact, SPST (1a)
Contact rating:240 V AC,1 A or 30 V DC, 1 A(resistance load)
Contact function Upper or lower ON/OFF alarm each measurement items.
Contact action Closed when status is in the event.
Opened when any erroneous status is normal or power is down.
R1,R2 and R3 share a common terminal.
Self diagnosis contact RF
Contact type : relay contact , SPDT (1c)
Contact rating:240 V AC,1 A or 30 V DC, 1 A(resistance load)
C-NO contact action : Closed when status is normal. Opened when any erroneous status is
detected or power is down. R4 and RF share a common terminal.
Contact inputNumber of input:1
Contact type:open collector. No-voltage contact
Function : Hold command
Communication outputRS-485 communication
Self-checkSensor diagnosis (Short-circuit and disconnection of the temperature sensor).
Converter error
Temperature
compensation
of conductivity
● Arbitrary temperature coefficient entry
(reference temperature : 25℃, temperature coefficient : 0%/℃ to 5%/℃)
● Arbitrary temperature compensation formula entry
(reference temperature : 25℃, formula is defined by user)
● No temperature compensation is performed.
Temperature
compensation range
0 to 100℃
The temperature compensation under 0℃ and over 100℃ is expanded by a function
Ambient temperature5 to 45℃
Relative humidity-25 to 65℃
Power supplyRated voltage 24 V DC, 10W (max.)
StructureIndoor-use panel installation type
Panel case : ABS, terminal : PBT
Panel : IP65 dust and water proof structure
Conforming standardsCE MarkingEMC Directive : EN61326-2-3
FCC RuleFCC Part15
MassApprox. 550g
External dimensions96 (W) × 96 (H) × 115 (D) mm
Case depth : approx. 105mm (when panel-mounted)
Compatible sensorsFS-09F-1/2

 

■Specification sensor

ModelFS-09F-1/2FS-09F-1/2-200
Wetted materialGlass carbon, PFA. Kalrez® 6375
pipe size1/2 inch
Flow rate0L/min to 10
Keep enough flow rate to measure latest sample.
Sample pressure0 to 0.3MPa (Temperature : 20 to 30 degree℃)
Sample temperature20~30 degree℃
If the difference between the ambient temperature
and the sample liquid temperature is 5 degree℃,
a measurement error of about 1 degree℃ will occur.
Cable lengthApprox. 3.5m

 

Dimensions (mm)


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