＊1 Flow rate accuracy can be guaranteed down to 0.1 SCCM N2 equivalent.
＊2 This is guaranteed value under 25 ℃ and ≤ 1 × 10-3 Pa (A).
＊3 Setting time is MFC output signal and N2 gas at 25 ℃. Definition of setting time is 2 %S.P. or 0.05 %F.S. of the change in setting, whichever is larger. However, if the change in setting is less than 0.5 %F.S., 50 % of the change in setting.
＊4 Pressure perturbation has to be smaller than 20 % pressure change per second and ±70 kPa/sec. (±10 PSI/sec.)
＊5 Zero adjustment is required to eliminate orientation influence after installation.
＊6 EtherCAT® is a registered trademark and patented technology, licensed by Beckhoff Automation GmbH in Germany.
