| Model | SEC-Z714SMG *10 / SEC-Z717SMG *11 | SEC-Z724SMG *10 / SEC-Z727SMG *11 | |||
| Full-scale flow rate (N2 conversion flow rate) | MR.MG number #01 : 30 SCCM | MR.MG number #03 : 300 SCCM | MR.MG number #06 : 10 SLM | MR.MG number #07 : 30 SLM #08 : 50 SLM | |
| Flow rate accuracy *1 *2 | ≤± 1.0 %S.P. (Flow rate ≥ 5 %) ≤± 0.05 %F.S. (Flow rate < 5 %) | ||||
| Linearity *1 | ≤± 0.5 %F.S. | ||||
| Repeatability *1 *3 | ≤± 0.15 %S.P. (Flow rate ≥ 5 %) ≤± 0.0075 % F.S. (Flow rate < 5 %) | ||||
| Zero point temperature effect | ≤± 0.01 %F.S./℃ | ||||
| Span temperature effect | ≤± 0.05 %F.S./℃ | ||||
| Zero point output stability *4 | ≤± 0.3 %F.S./year | ||||
| Flow rate control range | 0.5-100 %F.S. Auto close function : ≤ 0.25 %F.S. | ||||
| Step-up flow response time *5 | 450 ± 30 ms (0 %F.S. → 5 %F.S. < T ≤ 100 %F.S.) ≤ 600 ms (0 %F.S. → 2 %F.S. < T ≤ 5 %F.S.) ≤ 1 s (0 %F.S. → 0.5 → F.S. < T < 2 → F.S.) | ||||
| Step down flow response time *5 | 450 ± 30 ms (100 %F.S. → 10 %F.S. < T ≤ 80 %F.S.) ≤2 s (100 %F.S. → 0.5 %F.S. < T ≤ 10 %F.S.) ≤200 ms (100 → F.S. → 0 %F.S. (Valve closed)) | ||||
| Flow response time adjustment (Tunable Response) *5 *6 | Tunable range 300 ms ≤ T ≤ 1000 ms (0.3 s ≤ T ≤ 1 s) Adjustment accuracy User specified time ± 50 ms (± 0.05 s) | ||||
| Supply pressure condition | ≤ 450 kPa (G) | ||||
| Operating differential pressure | max | 400 kPa (D) | |||
| min | 100 kPa (D) (Supply pressure < 150 kPa (A)) 50 kPa (D) (Supply pressure ≥ 150 kPa (A)) | 100 kPa (D) | 200 kPa (D) | ||
| Proof pressure | 1 MPa (G) | ||||
| Flow rate at fully closed control valve *7 | ≤ 0.1 %F.S. | (N.C.valve) ≤ 0.2 %F.S. (N.O.valve) ≤ 0.5 %F.S. | |||
| Pressure transient sensitivity *8 | ≤± (1.5 %F.S. + 1.5 %S.P.) | ≤± 1.0 %F.S. | |||
| Pressure measurement accuracy | ≤± 3.5 kPa (Measurement range : 0-700 kPa (A)) | ||||
| Operating temperature *9 | 15-60℃ | ||||
| Temperature measurement accuracy | ≤± 2℃ (Measurement range : 15-60℃) | ||||
| Leak integrity | ≤ 5 × 10-12 Pa • m3/s (He) | ||||
| Valve type | Normally closed : N.C. Normally opend : N.O. | ||||
| Wetted materials | SUS316 L, Ni-alloy, PFA (Bin#01-#04) | ||||
| Fitting | 1/4 inch VCR equivalent fitting-to-fitting dimension 124 mm 1.125 inch C-Seal Port-to-port dimension 92 mm 1.125 inch W-Seal Port-to-port dimension 92 mm | ||||
| Communication interface | M12 (5 pin) male connector DeviceNet™protocol *10 RJ45 connector × 2 EtherCAT®protocol *11 | ||||
| Service communication port | φ2.5 port Dedicated RS-485 communication | ||||
| Power supply | M12 (5 pin) male connector 24 VDC, 7.5 VA Applicable for ODVA standard *10 M8 (5 pin) male connector 24 VDC ± 4 V, 7.5 VA *11 | ||||
| Weight | 1.3kg *10 / 1.1kg *11 | ||||
| Mounting orientation | Free | ||||
| Warm-up operation time | ≥ 60 minutes | ||||
| Storage temperature | 0-80℃ (Non condensing) | ||||
*1: Value applicable to a calibration gas (N2) or the gas types measured with our benchmark equipment. *2: Flow rate accuracy with the ambient temperature at 23 ± 2℃ (in compliance with SEMI E56-0309). *3: Complies with
"repeatability" as defined by SEMI E56-0309. *4: Zero point output stability in compliance with SEMI E69-0298. *5: The response time is defined as the time that it takes for the product's flow rate output to reach 98 % of the amount of
the change set for the flow rate. For any change in flow rate control to 0 %F.S. (valve closed), the response time is defined as the time it takes for the product's flow rate output to reach 0.5 %F.S. *6: The value in our conditions as
based on the use of a calibration gas (N2). *7: Flow rate when the control valve is fully closed and a calibration gas (N2) is supplied at 450 kPa (G). *8: Flow rate variation amount where a 2 psi pressure change (in compliance with
SEMI F64-0701) occurs in a 1second period when flow rate control is applied between 5 %F.S. and 100 %F.S. in our conditions as based on the use of a calibration gas (N2). *9: The product's temperature output constitutes the
benchmark. The product's temperature may rise higher than the environmental temperature if a source of heat exists in the vicinity of the product or if multiple units of the product have been installed in close proximity to each other.
*10: DeviceNet™ communication model. *11: EtherCAT® communication model.
- In notation of pressure unit, (D) shows differential pressure, (G) shows gauge pressure, (A) shows absolute pressure. ???? SCCM, SLM are symbols representing the gas flow rate (ml/min, l/min, at 0℃ 101.3 kPa).
- % F.S.is the percentage of the set full scale flow rate. % S.P. is a percentage of the set flow rate setting.
